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Metal-insulator-metal capacitors
 
   
Document Number
US Patent 7557399
Issued Date
July 7, 2009
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Abstract
A metal-insulator-metal (MIM) capacitor is provided. The bottom electrode of the MIM capacitor is electrically connected to a connection node. The connection node may be, for example, a contact formed in an interlayer dielectric, a polysilicon connection node, a doped polysilicon or silicon region, or the like. A contact provides an electrical connection between the connection node and components formed above the connection node. A second contact provides an electrical connection to the top electrode.
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Number of Claims:
20
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Published
July 7, 2009
Application Number
11/704,088
Filed
February 8, 2007
US Classification
257/306   257/311
Int'l Classification
H01L   31/119   (20060101)  
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Parent Case
This application is a divisional of patent application Ser. No. 10/811,409, entitled "Metal-Insulator-Metal Capacitors," filed Mar. 26, 2004, now U.S. Pat. No. 7,195,970 which application is incorporated herein by reference.
USPTO Field of Search
257/306   257/311  
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