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Apparatus and method for measuring displacement, surface profile and inner radius
   
Document Number
US Patent 7567350
Issued Date
July 28, 2009
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Inventors
Cao; Hong-Xi (Hsinchu Hsien,TW)
Liao; Jen-Chuen (Hsinchu Hsien,TW)
Hsu; Ricky (Hsinchu Hsien,TW)
Cheng; Sheng-Jang (Hsinchu Hsien,TW)
Horng; Ji-Bin (Hsinchu Hsien,TW)
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Abstract
An apparatus and a method are proposed for measuring displacement, surface profile and roughness of a moving object or an inner radius of a hollow cylinder. The apparatus includes a light emitting unit, a light dispersing unit for receiving light from the light emitting unit and focusing rays with different wavelengths into different focal points with different intervals, and a wavelength measuring unit for measuring wavelengths of the rays. When the moving object is moving within a dispersing range of the focal points, the rays with different wavelengths are reflected or scattered, and the displacement of the moving object is learned from variation of the wavelengths being measured by the wavelength measuring unit. Given that a reflecting component is disposed in the centre of an inner circle of the hollow cylinder, the inner radius of the hollow cylinder can be measured by the principle of the apparatus for measuring displacement.
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Number of Claims:
15
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Published
July 28, 2009
Application Number
11/439,228
Filed
May 24, 2006
US Classification
356/614   356/601
Int'l Classification
G01B   11/14   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
May 25, 2005 [TW] 94117011 A
USPTO Field of Search
356/601   356/602   356/603   356/604   356/605   356/606   356/607   356/608   356/609   356/610   356/611   356/612   356/613   356/614   356/615   356/616   356/617   356/618   356/619   356/620   356/621   356/622   356/623   356/624   356/600  
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