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Method and device for continuously measuring silicon island elevation
 
   
Document Number
US Patent 7573587
Issued Date
August 11, 2009
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Inventors
Lu; Zheng (O'Fallon, MO)
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Abstract
A method of continuously measuring an elevation and shape of an unmelted polycrystalline silicon island during a silicon meltdown process. The method comprises projecting a focused bright light on the silicon island to produce a bright dot on the silicon island. The method also includes electronically determining an elevation and a shape of the silicon island by tracking the bright dot during the meltdown process.
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Number of Claims:
13
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Published
August 11, 2009
Application Number
12/197,669
Filed
August 25, 2008
US Classification
356/634  
Int'l Classification
G01B   11/14   (20060101)   G01B   11/22   (20060101)  
Assistant Examiner
Attorney/Law Firm
USPTO Field of Search
356/600   356/601   356/602   356/603   356/604   356/605   356/606   356/607   356/608   356/609   356/610   356/611   356/612   356/613   356/614   356/615   356/616   356/617   356/618   356/619   356/620   356/621   356/622   356/623   356/624   356/625   356/626   356/627   356/628   356/629   356/630   356/631   356/632   356/633   356/634   356/635   356/636   356/637   356/638   356/639   356/640  
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