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Electrically rewritable non-volatile memory element and method of manufacturing the same
 
   
Document Number
US Patent 7582889
Issued Date
September 1, 2009
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Abstract
A non-volatile memory element includes a lower electrode, an upper electrode, a recording layer arranged between the lower electrode and the upper electrode and containing a phase change material, and a bit line directly arranged on the upper electrode. The bit line is formed to be offset to the recording layer. With this arrangement, a contact area between the recording layer and the upper electrode and a contact area between the upper electrode and the bit line can be reduced without providing an interlayer insulation film between the upper electrode and the bit line. Thus, heat radiation to the bit line can be suppressed while the upper electrode and the bit line are connected without using a through-hole.
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Number of Claims:
13
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Published
September 1, 2009
Application Number
11/594,747
Filed
November 9, 2006
US Classification
257/4   257/E45.002
Int'l Classification
H01L   47/00   (20060101)  
Examiner
Attorney/Law Firm
Priority Data
Nov 28, 2005 [JP] 2005-341476
USPTO Field of Search
257/2   257/3   257/4   257/5   257/E45.002   365/148   365/163  
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