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Apparatus and method for detecting error of transfer system
 
   
Document Number
US Patent 7586624
Issued Date
September 8, 2009
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Inventors
Kim; Sang Gyu (Gyeonggi-do,KR)
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Abstract
An apparatus for detecting error of a transfer system that is adapted for detecting an error of a transfer system transferring a substrate loaded upon fabricating of a flat panel display device in a real time is disclosed. In the apparatus, an emitter generates a light and radiates the light into a transfer system. A receiver receives light reflected from the transfer system. A controller controls light radiation from the emitter, and measures the time such that a reflective light of the transfer system is received from an emitting point of the emitter to the receiver. The controller also detects a displacement of the transfer system using the measured time, a designated reference distance and a reference time. A display displays the displacement of the transfer system detected by the controller.
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Number of Claims:
18
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Owner
Published
September 8, 2009
Application Number
11/454,716
Filed
June 16, 2006
US Classification
356/614  
Int'l Classification
G01B   11/14   (20060101)  
Attorney/Law Firm
Priority Data
Dec 27, 2005 [KR] 10-2005-0130765
USPTO Field of Search
356/614   356/615   356/616   356/617   356/618   356/619   356/620   356/621   356/622   356/623   356/624   356/625   356/626   356/627   356/628   356/629   356/630   356/631   356/632   356/633  
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