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Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method
 
   
Document Number
US Patent 7587912
Issued Date
September 15, 2009
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Abstract
The present invention refers to a method for producing a quartz glass crucible for use in pulling silicon single crystal, said crucible having at least a double-layer structure comprising a pore-free transparent inner layer and an opaque base body or outer layer having pores, characterized in that at least the base body is formed with a silica powder maintained in a gas having a mixing ratio of 0.0005 to 0.0065 kg/kg (dry gas), and a quartz glass crucible produced by said production method. The obtained crucible has an average OH group concentration of 50 ppm or lower and is capable of suppressing the vibration occurring on the surface of silicon melt during pulling the silicon single crystal. Further the obtained crucible suffers less deformation of the crucible on pulling the silicon single crystal.
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Number of Claims:
4
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Published
September 15, 2009
Application Number
10/547,053
Filed
February 20, 2004
US Classification
65/17.3  
Int'l Classification
C03B   19/09   (20060101)  
Assistant Examiner
Attorney/Law Firm
Priority Data
Feb 28, 2003 [JP] 2003-052704
USPTO Field of Search
65/17.3  
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