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Thin wire pressure sensor



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Document Number
US Patent 4106350
Issued Date
August 15, 1978
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Abstract
Pressure sensing apparatus in which a mounting structure carrying a thin, pressure sensitive resistance wire is lodged in a gas passageway extending through an outer member. The mounting includes a relatively large end portion which extends substantially across the passageway to both shield the wire from direct impact by passing gas, and limit the flow of such gas by occluding the passageway. The secure wire mounting apparatus makes possible the use of very thin wires and a corresponding increase in pressure sensitivity resulting from temperature and gas thermal conductivity. The wire diameter is no more than about 0.00005 inch, making possible results comparable to much more expensive mass spectrometer techniques. An overall pressure sensing system is described in which the sensor is coupled with electric circuitry to produce transient and/or absolute pressure readings over an approximately nine decade pressure range. Transient readings of gas temperature and thermal conductivity may also be made.
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Thin wire pressure sensor - US Patent 4106350 Drawing
Drawing from US Patent 4106350
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Number of Claims:
22
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Owner
Published
August 15, 1978
Application Number
05/828,317
Filed
August 29, 1977
US Classification
73/755  
Int'l Classification
G01L   21/00   (20060101)   G01L   21/12   (20060101)   G01L   9/02   (20060101)   G01M   3/16   (20060101)  
Attorney/Law Firm
USPTO Field of Search
73/399   73/398AR   73/398R   73/204   73/27R   73/755   338/318   338/319   338/36  
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Description
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