An ultrasonic motor has a stator and a rotor which is pressure-contacted to be in contact with the stator and is driven by a travelling oscillatory wave. The stator comprises: a second layer having an electromechanical energy conversion element; a first layer having an elastic member to be excited by the electromechanical energy conversion element to generate the travelling oscillatory wave; and a one or more ply third layer between the first and the second layers whose spring modulus is smaller than those of the two layers and which is made of the same material as or different material from those of the two layers.
This is a division of application Ser. No. 08/380,191 filed Jan. 30, 1995, which is a continuation of application Ser. No. 08/099,122 filed Jul. 29, 1993 (abandoned).
A drive assembly for a wing of a micromechanical flying insect. The drive assembly comprises a honey comb structure. A method for flying a micromechanical flying insect comprising moving a wing with a drive assembly having a stiffness to weight ratio greater than about 16.times.10.sup.10 N/mKg.
