A method for forming sloped contact corners of an integrated circuit, and an integrated circuit formed according to the same, is disclosed. A first oxide layer is formed over the integrated circuit. An insulating layer is formed over the oxide layer. The oxide and insulating layers are then patterned and etched to form a contact opening to expose a conductive region underlying a portion of the oxide layer. A second oxide layer is formed in the bottom of the contact opening. The insulating layer is then reflowed to form rounded contact corners after which the second oxide layer is removed.
This is a continuation of application Ser. No. 08/036,222, filed on Mar. 24, 1993, abandoned, which is a division of application Ser. No. 07/816,633, filed Dec. 31, 1991abandoned.
There is formed on a semiconductor substrate a lamination of a first insulating film of nondoped silicon glass or the like and, on this first insulating film, a second insulating film of boron phosphor silicate glass or the like, with a conductor layer between the two insulating films. A hole is first dry-etched in the second insulating film, leaving the substrate surface covered by the first insulating film. Then the second insulating film is heated to a reflow temperature such that the hole is thermally deformed, flaring as it extends away from the insulating film. Then a second hole is dry-etched in the first insulating film through the first recited hole in the second insulating film, with the consequent exposure of the semiconductor surface. Then a contract electrode is fabricated by filling the first and the second hole with an electroconductive material into direct contact with the substrate surface. Being covered by the first insulating film, the substrate surface is not to be contaminated with impurities during the heating of the second insulating film.
A method of depositing a dielectric ply structure to optimize the planarity of electronic devices that include a plurality of active elements having gate regions laid across the substrate as discrete parallel lines, such as the bit lines of memory cells. In accordance with the principles of the present invention, the plurality of bit lines may be isolated from one another by the dielectric ply structure to provide a planar architecture onto which an optional conductive layer may be deposited. The resulting planarization avoids the typical shortcomings of the prior art, such as the lack of electrical continuity in the word lines or their excessively high electrical resistance from slenderized portions in the conductive sections due to poor planarity of the surfaces upon which the conductive layer is deposited.
A method of depositing a dielectric ply structure to optimize the planarity of electronic devices that include a plurality of active elements having gate regions laid across the substrate as discrete parallel lines, such as the bit lines of memory cells. In accordance with the principles of the present invention, the plurality of bit lines may be isolated from one another by the dielectric ply structure to provide a planar architecture onto which an optional conductive layer may be deposited. The resulting planarization avoids the typical shortcomings of the prior art, such as the lack of electrical continuity in the word lines or their excessively high electrical resistance from slenderized portions in the conductive sections due to poor planarity of the surfaces upon which the conductive layer is deposited.
