A pulse signal output circuit charges and discharges a capacitor in response to a clock signal and outputs a pulse signal having a pulse width determined by a time for charging and discharging the capacitor. A control signal generation circuit outputs a control signal in response to the pulse signal, where the control signal has a first voltage level determined by the pulse width. An output circuit has a first output transistor and a first regulating transistor connected in series between the first power supply node and the output terminal. The first output transistor is operated in response to a signal transferred from inside or outside a semiconductor device, and the first regulating transistor is operated in response to the control signal.
A vacuum network control system includes a vacuum network controller hub communicating over a public high-speed network, where the hub has an address registered with respect to the non-local network and communicates over a first local high-speed network. Vacuum network controllers (VNCs) communicate with the hub over the first local network. Each VNC has a dynamically assigned local address and communicates with at least one component intrabus module over a second local high-speed network. Each module has a dynamically assigned local address and further communicates with one or more monitor and control end units over a local device network. Each monitor and control end unit has a dynamically assigned address. Monitor and control end units include taps, which provide at least one of analog, digital or serial I/O, and components, for example, vacuum pumps. Device addresses can be dynamically assigned based on unique identification information sent by the device upon the device's initialization, where the device's assigned local address is transmitted back to the device in response.
