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Semiconductor device with gold bumps, and method and apparatus of producing the same



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Patent 6344690
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Document Number
US Patent 6344690
Issued Date
February 5, 2002
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Abstract
A semiconductor device comprises a semiconductor element having electrodes and metal bumps are attached to the electrodes. The metal bumps include copper cores and gold surface layers covering the cores. In addition, the metal bumps may include gold bump elements and solder bump elements connected together.
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Semiconductor device with gold bumps, and method and apparatus of producing the same - US Patent 6344690 Drawing
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Number of Claims:
9
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Owner
Fujitsu Limited (Kawasaki,JP)
Published
February 5, 2002
Application Number
09/691,142
Filed
October 19, 2000
US Classification
257/741   257/737 257/781 257/E23.021
Int'l Classification
H01L   23/485   (20060101)   H01L   23/48   (20060101)  
Parent Case
This appln is a Div of Ser. No. 09/014,981 filed Jan. 28, 1998.
Priority Data
Sep 08, 1997 [JP] 9-242459
USPTO Field of Search
257/741   257/781   257/780   257/738   257/737  
Related Patents
7541681 - Interconnection structure, electronic component and method of manufacturing the same - Owned by Infineon Technologies AG (Munich,DE)

An interconnection structure includes an electrically conductive bump, wherein the electrically conductive bump has a metal body having a distal end. The metal body is free of solder. An outermost layer of diffusion solder is positioned on at least regions of the metal body of the electrically conductive bump.

Claims
Description
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