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Phase changeable memory devices having reduced cell areas



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Document Number
US Patent 6849892
Issued Date
February 1, 2005
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Abstract
Phase changeable memory devices include an integrated circuit substrate and first and second storage active regions on the integrated circuit substrate. The first and second storage active regions have a first width and a second width, respectively. A transistor active region on the integrated circuit substrate is between the first and second active regions, the first and seconds widths being less than a width of the transistor active region.
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Number of Claims:
20
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Published
February 1, 2005
Application Number
10/617,958
Filed
July 11, 2003
US Classification
257/298   257/248 257/E27.004
Int'l Classification
G11C   16/02   (20060101)  
Examiner
Assistant Examiner
Priority Data
Aug 20, 2002 [KR] 10-2002-0049137
USPTO Field of Search
257/298   257/248   257/154   257/3   257/4   257/295   257/5   365/148   438/95  
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7259040 - Process for manufacturing a phase change memory array in Cu-damascene technology and phase change memory array manufactured thereby - Owned by STMicroelectronics S.r.l. (Agrate Brianza,IT)

A process for manufacturing a phase change memory array, includes the steps of: forming a plurality of PCM cells, arranged in rows and columns; and forming a plurality of resistive bit lines for connecting PCM cells arranged on a same column, each resistive bit lines comprising a respective phase change material portion, covered by a respective barrier portion. After forming the resistive bit lines, electrical connection structures for the resistive bit lines are formed directly in contact with the barrier portions of the resistive bit lines.

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