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Compensating for effects of non-isotropic gas mixtures in interferometers



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Patent 7042574
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Document Number
US Patent 7042574
Issued Date
May 9, 2006
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Abstract
Methods and apparatus for reducing the effects of non-isotropic gas distributions on interferometry measurements are disclosed.
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Owner
Zygo Corporation (Middlefield, CT)
Published
May 9, 2006
Application Number
10/309,394
Filed
December 3, 2002
US Classification
356/498   356/450 356/517
Int'l Classification
G01B   9/02   (20060101)  
Examiner
Attorney/Law Firm
Parent Case
CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to Provisional Patent Application 60/337,459, entitled "A METHOD FOR COMPENSATION FOR EFFECTS OF NON-ISOTROPIC GAS MIXTURES IN SINGLE-WAVELENGTH AND MULTIPLE-WAVELENGTH DISPERSION INTERFEROMETRY," to Henry Hill, and filed Dec. 3, 2001, the entire contents of which are hereby incorporated by reference in their entirety.
USPTO Field of Search
356/517   356/486   356/450   356/500   356/498  
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