A method of approaching a probe to a target position on a sample mounted on a sample stage tilted at a preselected tilt angle about a tilt axis of the sample stage. A distance between the tip of the probe and the target position of the sample is observed with a charged particle beam microscope while approaching the tip of the probe to the target position on the sample. The probe is moved in a direction so that on a display of the charged particle beam microscope, the tip of the probe and the tip...

A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the meas...

The present invention in one of its preferred structural embodiments comprises a plurality of generally rectangular radiation attenuating panels having rollers mounted on the bottom of each panel and rollable in a lower track mounted on a base such as the concrete floor of a building for movement of each panel along the lower track to a designated position to isolate workers in a particular area from a source of harmful radiation, wherein an upper track is mounted on a rigid structure adjacent u...

A system and method are provided for a high resolution radiation treatment system which provide for projecting a field of radiation energy at targeted patient tissue. The system uses a multi-leaf collimator, which is positioned such that a significant clearance is provided between the multi-leaf collimator and the isocenter plane where the targeted tissue is located. The leaves of the multi-leaf collimator are designed to provide for high step resolution in the projected radiation energy shape. ...

A method for identifying a drifted dose integrator in an implantation system and an implantation system are provided. The implantation system includes a first dose integrator and a second dose integrator. The first dose integrator includes a first input configured to receive a first current generated from charges carried by implanted ions in a wafer, and a first output configured to output a first accumulated dosage value. The second dose integrator includes a second dose integrator including a ...

To effectively eliminate radiation outside the band with a wavelength of 13.5 nm which has adverse effects on exposure without reducing the intensity of the EUV radiation with a wavelength of 13.5 nm, in an extreme UV radiation exposure tool which has an extreme UV radiation source device with an EUV focusing mirror which focuses extreme UV radiation and radiation outside the band which is emitted by the high density and high temperature region of a plasma, an illumination optical system for pro...

One embodiment relates to a method of behind-the-lens dark-field imaging using a scanning electron microscope apparatus. An incident beam is focused onto a specimen surface using an immersion objective lens, and the incident beam is deflected so as to scan the incident electron beam over a field of view of the specimen surface. A secondary electron beam is detected using a segmented detector to obtain a set of pixel data for each segment of the detector. Scan-dependent movement of the secondary ...

In a method of measuring a thin film sample of irradiating an electron beam to a thin film sample, detecting a generated secondary electron and measuring a film thickness of the thin film sample by utilizing the secondary electron, it is provided that the film thickness is measured accurately, in a short period of time and easily even when a current amount of the irradiated electron beam is varied. An electron beam 2b is irradiated, and a generated secondary electron 4 is detected by a secondary...

A beam directing element configured to receive a substantially collimated input beam of predetermined wavelength propagating in a first direction and to output a substantially collimated output beam in a second direction includes a prism formed of a transparent material and having input and output faces, wherein the internal angle between the input face and the output face is such that when the input beam is incident on the input face substantially at Brewster's angle, it is internally incident ...

The present invention provides an improved positron radioactive drug radiation shielding device, which achieves savings in space required to store a canister after dismantling the device. Furthermore, a tungsten sleeve is disposed within the canister, and functions in coordination with a syringe. The tungsten sleeve is able to block radioactive radiation released by radioactive drugs contained in the syringe. Moreover, a front cover and a rear cover joined to two sides of the canister enable a h...