Spraying a surface of a reticle with carbon dioxide snow cleans the surface and removes particles. Further spraying the surface of the reticle with carbon dioxide snow at a temperature below a carbon dioxide sublimation temperature forms a solid carbon dioxide layer on the surface. The solid carbon dioxide layer prevents particles from contacting the surface of the reticle. The solid carbon dioxide layer may be removed, and the reticle may be used in a extreme ultraviolet lithography tool.

According to an embodiment of the invention, a method for repairing a coated high pressure turbine blade, which has been exposed to engine operation, to restore coated airfoil contour dimensions of the blade, and improve upon the prior bond coat is disclosed. The method comprises providing an engine run high pressure turbine blade including a base metal substrate made of a nickel-based alloy and having thereon a thermal barrier coating system. The thermal barrier coating system comprises a diffu...

The object of the present invention is to provide an apparatus and method for forming a deposited film which can repeatedly form a large amount of functional deposited films with good reproducibility without degradation in the characteristics of films formed even when gas leakage occurs in a shut-off valve, and without reducing the yield as a result when gas leakage occurs in the shut-off valve, by immediately detecting and repairing it. The deposited film forming apparatus according to the pres...

The invention provides a method for plasma coating of optical lenses, particularly lenses made of silicone-containing polymer. The method of the invention comprising selectively depressurizing and pressurizing an entry hold chamber and an exit hold chamber while constantly maintaining a plasma gas in a coating chamber at a process pressure without depressurizing and pressurizing repeatedly the coating chamber, wherein the coating chamber is located between the entry hold chamber and the exit hol...

Chemical vapor deposition methods of forming titanium silicide including layers on substrates are disclosed. TiCl.sub.4 and at least one silane are first fed to the chamber at or above a first volumetric ratio of TiCl.sub.4 to silane for a first period of time. The ratio is sufficiently high to avoid measurable deposition of titanium silicide on the substrate. Alternately, no measurable silane is fed to the chamber for a first period of time. Regardless, after the first period, TiCl.sub.4 and at...

Collecting rods are pre-greased for use with a rotorod sampler. Multiple collecting rods are molded in one piece with a header to form a group. The collecting rods are attached to the header by thin gates so that they can be easily broken off for use. Multiple groups are combined into an assembly that is adhered to a container lid and dipped into a pre-greasing suspension to pre-grease the collecting rods. The container lid is attached to the rest of the container to enclose the pre-greased coll...

A method for preheating golf ball covers prior to painting. The process comprises forming a golf ball with a cover, then heating the cover from about 90.degree. F. to about 150.degree. F. for 1 to 3 hours in a heated enclosure prior to applying a coat of primer or paint to the ball. This is done to accelerate the evaporation of paint solvents, immediately after the paint is applied. The painted balls are subsequently dried in a heated enclosure at about 105.degree. F. to 108.degree. F. All addit...

A system and method is disclosed for applying polyurethane to a roll that is primarily used in the papermaking industry. One advantage of the present system and method is that the polyurethane may be applied to the roll in one pass of a traversing mechanism along the length of the roll while the roll rotates, thus significantly decreasing processing time of the roll.

Methods for preventing dissolution of solid substrates, such as metal leaching from coal or corrosion of metal surfaces, are provided. The method comprises coating the solid substrate with a chelate ligand having the general structure: ##STR1## where n is an integer from 1-4, and X is selected from the group consisting of hydrogen, lithium, sodium, potassium, rubidium, cesium, and francium. A method for preventing metal leaching from coal, such as acid mine drainage or metal leachate in runoff f...

An optical information medium which has excellent abrasion resistance and which further exhibits sufficient smudge-proof properties is provided. The optical information medium is coated on at least one surface with a film of a silane coupling agent containing a water- or oil-repellent substituent, said silane coupling agent being represented by the following formula (1): R.sub.1 --Si(X)(Y)(Z) wherein R.sub.1 is the water- or oil-repellent substituent; X, Y and Z are independently a monovalent gr...