This tool includes: a rigid support (104) having a transverse end surface (113); an elastically compressible interface that is pressed against and covers the end surface; a flexible pad adapted to be pressed against the optical surface, itself pressed against and covering the interface on the opposite side of and in line with the end surface (113); spring return element (115) connecting the support (104) to a peripheral portion of the flexible pad situated transversely beyond the end surface (11...

A surface treatment or a two-step injection molding is used to make an inlaid polishing pad. A surface of the inlaid polishing pad has areas of different rigidity to control the rigidity and compressibility of the inlaid polishing pad. Furthermore, methods of making such an inlaid polishing pads are also disclosed.

A polishing system can have a rotatable platen, a polishing pad secured to the platen, a carrier head to hold a substrate against the polishing pad, and an eddy current monitoring system including a coil or ferromagnetic body that extends at least partially through the polishing pad. A polishing pad can have a polishing layer and a coil or ferromagnetic body secured to the polishing layer. Recesses can be formed in a transparent window in the polishing pad.

The disclosure is directed to a method of forming a structured abrasive article. The method includes coating a backing with an abrasive slurry comprising binder and abrasive grains, partially curing the abrasive slurry and forming a pattern in the partially cured abrasive slurry.

A hand tool quick release mechanism for releasably connecting a frame to a base, the quick release mechanism comprising a frame connecting mechanism and a base connecting mechanism each for respectively coupling releasably the frame and base together, wherein the frame and base are placed into an attached position by urging the frame connecting mechanism into the base connecting mechanism. The quick release mechanism claimed in claim 1 wherein the frame attachment mechanism including a push pad ...

The present invention comprises a customized polishing pad for use in a wafer polishing machine. The polishing pad of the present invention includes a polishing surface integral with the polishing pad. The polishing surface is adapted to frictionally contact a wafer in the polishing machine, thereby polishing the wafer. The polishing surface of the polishing pad includes at least two areas, where each area is adapted to frictionally contact the wafer and achieve a polishing effect specific for t...

Methods and apparatus are provided to provide a substantially uniform layer thickness above a wafer contour as the wafer rotates and is traversed past a pre-planarization tool. The tool has a shank defining an axis of rotation, and a planarization member coupled to the shank has a hook-shaped section supporting a pre-planarization surface spaced by an at-rest-distance from the axis of during an at-rest condition of the shank. The hook-shaped section has a modulus of elasticity selected so that u...

An abrasive sheet is made from an abrasive media mounted to a polymeric foam support member forming a one-piece abrasive sheet that is easily cut into any desirable configuration. The abrasive sheet is easily mounted to a holder adaptable to hand-held manual or powered tools.

An abrasive substrate is removably provided between a head portion and an abrasive member in a carry type abrasive machine. The abrasive substrate is constituted by a single synthetic resin molded member formed of the same material, and a hardness in a peripheral portion is set to be lower than that in a central portion excluding the peripheral edge portion. A difference in the hardness between the central portion and the peripheral portion is regulated by a concavo-convex surface formed on a su...

An aircraft pneumatic cabin pressure control system that is adapted to prevent the difference between cabin pressure and atmospheric pressure from exceeding a threshold value wherein the threshold value varies in relation to aircraft altitude. In some instances the control system includes at least one outflow valve adapted to prevent the difference between cabin pressure and atmospheric pressure from exceeding a threshold value, and the control system is adapted to override the outflow valve at ...