Apparatus for impregnating a porous substrate such as wood with a treating liquid including a cylinder which is arranged to be secured to a pressure vessel, a free piston reciprocable in the cylinder and being exposed to the pressure conditions in the vessel, a striker pad and striker rod assembly cooperating with the free piston, a bias spring acting on the striker rod to urge the rod and striker pad in opposition to the fluid pressure acting on the piston, damping means urging the rod against ...

Apparatus for automatically positioning articles, as silicon semiconductor wafers, on rotary spin assembly mechanisms and indexing transporting means and a means for holding said wafer thereon combined with a means for dispensing a predetermined amount of photoresist solution on said wafers and spinning a uniform film of solution on the wafers and spin air drying through a sequence of rotating indexing steps followed by automatic transfer to and through drying means and a means for unloading the...

In order to subject a workpiece, such as a semiconductor wafer, to elevated pressures the workpiece is enclosed in a void (16) between two enclosure parts (6,7) which have been forced together by upper and lower actuators (12,13). The enclosure parts (6,7) are themselves enclosed in a vacuum chamber (1) evacuatable by a vacuum pumping system. Gas is then supplied from a suitable pressure source via a pipe (17) into void (10), thereby to subject the workpiece to elevated pressure. Heating means m...

An apparatus for longitudinal fluid impregnation of a log comprising a cap for enclosing one end of a log, the cap having a rear wall and a peripheral side wall so as to define a fluid treatment zone, members inserted through apertures in the side wall of the cap for locking it to the log, a first ring for encircling the log and abutting the said members, a self-sealing compressible means for encircling the log and abutting the first ring, a second ring for encircling the log and abutting the se...

Apparatus for coating a support such as a monolithic catalyst support (5) comprises a dispenser (1) for dispensing a predetermined quantity of coating liquid, a containment (2) for the liquid and a source of vacuum (8, 9) which can be actuated to draw the entire quantity of coating liquid into the support (5). The apparatus and method are particularly useful for coating car catalysts without wastage and with increased design options.

In apparatus for charging and discharging substrates, substrates are disposed in a magazine or substance store and into the pre-chamber of a high-vacuum-processing-chamber which is made as a vacuum chamber, the magazine being pushed into a housing, which at its lower side provides an opening. The housing can be deposited with the magazine onto the upper part of the wall of the lower box, an air lock plate held below an opening in the upper part of the wall taking the magazine and lowering it int...

This invention relates to a coating equipment to be used for coating a coating solution (coating diffusion agent, photo-resist agent, etc.) on a film which forms patterns of photo mask substrates (hereinafter merely called "substrates") used for production of reticle and photo masks or of glass substrates used for liquid crystal display. It features that said coating equipment comprises of a substrate table (spin head) being formed on the upper part of the spindle, a through hole whose dimension...

Apparatus for reducing the sagging of essentially planar outside walls (3, 13) on a vacuum tank (1) under operating conditions, and for preventing displacements, resulting therefrom, of components fastened to these outside walls (3, 13), such as rollers (7, 8) of a winding apparatus (2) which is movable with respect to the vacuum tank (1) in a vacuum tape coating apparatus, wherein spacers (12, 14) are provided between two opposite outside walls (3, 13).

A vacuum painting apparatus has movable entry and exit ports which compensate for bending or twisting of the strip material being painted. The entry and exit port templates are connected together by four compression struts. A spring-loaded slidable seal is provided around the periphery of each of the entry and exit port templates, sealing the templates to the box structure of the vacuum painting apparatus. The templates use either "Z" or "C" shaped parts each having first and second ends and a w...

A nozzle spray containment apparatus contains a fluid being sprayed onto a work surface. A containment portion contains the spray being applied to the work surface. The spray is applied through an opening formed in the containment portion. An adapter is mounted in a portion of the opening to modify the opening, the adapter being provided for adapting engagement of the containment portion to variations in the work surface and for varying the opening to accommodate the variations in the work surfa...