The invention relates to a Wien filter provided with electrodes for generating an electric field, and magnetic poles for generating a magnetic field, said electrodes and magnetic poles being positioned around and having a finite length along a filter axis, and being positioned around the filter axis such that electric and magnetic forces induced by the respective fields and exerted on an electrically charged particle moving substantially along the fileter axis at a certain velocity, take substan...

Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle ...

A magnetic field type mass spectrometer having an ion source, an ion accelerator, a mass separation magnet forming an analyzing part which changes the trajectory of ions by a magnetic field of the mass separation magnet, and a current detector, wherein the mass separation magnet is installed so that ions move along a trajectory which turns several times in the analyzing part, and repelling electrodes are installed at turning points of the ions, whereby ions generated from the ion source are caus...

A low energy ion implanter having an ion source for emitting ions and an implantation chamber spaced from the ion source by an ion beam path through which ions move from the source to the implantation chamber. A mass analyzing magnet positioned along the beam path between the source and the implantation chamber deflects ions through controlled arcuate paths to filter ions from the beam while allowing certain other ions to enter the ion implantation chamber. The magnet includes multiple magnet po...

A mass spectrometer comprises a source for generating ions, a means for separating the ions according to mass, and means for detecting the separated ions. The mass spectrometer is characterized by that means for separating ions comprises a sector type homogenous magnetic field, and that the magnetic field has a deflection angle ranging from 110 to 135 degrees, and incident and exit angles ranging from 40 to 60 degrees.

The invention relates to a miniature magnetic spectrometer with a coaxial structure. This spectrometer, associated with a particle generator, comprises a transformer producing a magnetic field for deflecting the charged particles injected at one end of the spectrometer body. The transformer is provided with a secondary circuit, constituting the spectrometer body, formed by an external conductor in short-circuit with an internal conductor and coaxial to the external conductor. These two conductor...

Improvements to reduce the size of a GCMS while improving its performance. A first improvement adjusts the magnet for radii of travel. Another feature removes a portion of the magnet to compensate for the fringe field. Yet another improvement shaves portions off of the yoke near where they meet the pole pieces.

A double focusing mass spectrometer having a diverging electrostatic field, a converging electrostatic field and a converging magnetic field. The two electrostatic fields are connected with each other without substantial free space therebetween. The ion beam passes through the electrostatic fields coming to an intermediate focus point adjacent to the ion exit boundary of said converging electrostatic field. The beam then passes through the magnetic field to satisfy the double focusing condition ...

A low energy ion implanter having an ion source for emitting ions and an implantation chamber spaced from the ion source by an ion beam path through which ions move from the source to the implantation chamber. A mass analyzing magnet positioned along the beam path between the source and the implantation chamber deflects ions through controlled arcuate paths to filter ions from the beam while allowing certain other ions to enter the ion implantation chamber. The magnet includes multiple magnet po...

The spectrometer includes a single magnet having two opposing pole faces each spanning at least a 270.degree. sector. A 270.degree. sector nonmagnetic chamber is juxtaposed in the air gap of the magnet and is provided with partitions for forming 90.degree. and 180.degree. sector portions. An ion source generates a relatively wide, parallel beam of ions which is accelerated into the 90.degree. sector portion. A common partition between the 90.degree. and 180.degree. sector portions and the partit...