A body of material treated by a glow discharge process is enclosed in a bell jar vessel removably suspended from and sealed to the bottom wall of a casing supported by the post of a stand above its base. Conduit fittings having passages extending into the bottom wall, establish fluid communication between the interior of the vessel and pressure controlling and monitoring apparatus. Power cables extend through the post into the casing, which encloses electrical circuitry connected to electrode as...

A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effluent from the exhaust conduit of the process chamber, a plasma cell having one or more electrodes electrically connected to a voltage source adapted to electrically bias the electrodes to couple energy to effluent received in the plas...

A non-thermal plasma reactor and method provides individually retained reactor plates. The method comprises stacking an alternating sequence of positive and negative reactor plates to form a reactor stack, placing temporary spacers between the positive and negative reactor plates. In one embodiment, individually retained reactor plates are secured by folds of a ceramic insulating layer extending between plate pairs, with reactor plates secured by the stack retention material and the folds of the...

The present invention is a method and apparatus for altering a carbon-containing compound in an aqueous mixture. According to a first aspect of the present invention, it has been discovered that for an aqueous mixture having a carbon containing compound with an ozone reaction rate less than the ozone reaction rate of pentachlorophenol, use of corona discharge in a low or non-oxidizing atmosphere increases the rate of destruction of the carbon containing compound compared to corona discharge an o...

A modular corona discharge reactor in which individual reactor chambers are arranged vertically and are grouped in serial pairs.

A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF.sub.4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the appara...

A purification system of exhaust gases in an internal combustion engine purifies the exhaust gases by disposing a reaction furnace in an exhaust pipe of the internal combustion engine. The system includes a reactor including a honeycomb carrier having a plurality of carrier cells in the reaction furnace and plasma generating electrodes. On each of the plurality of carrier cells, a photocatalyst layer is coated. Further, the plasma generating electrodes, having a plurality of electrode cells, are...

A reactor (1) particularly for the plasma treatment of internal combustion engine exhaust gases, in which a power supply (10) and a reactor bed (2) of the dielectric barrier discharge type are connected directly and enclosed in an earthed metal chamber (17) which both isolates the high voltage power supply and acts as a Faraday cage preventing the emission of electromagnetic radiation from the power supply or plasma.

An energy conversion cell for converting electric power into heat. The cell includes a non-conductive housing formed of spaced, preferably glass outer plates sealed along common perimeters thereof to define a closed interior volume or chamber. At least two catalytic plates are held spaced apart in the interior volume, preferably separated by a dielectric plate. The catalytic plates are preferably formed of very thin palladium plate material. A gas passage in gas communication with the interior v...

In an electrostatic separating apparatus which separates supplied substances containing sheet-like substances into conductive substances and insulating substances by using electrostatic force and corona discharge together, a ground electrode unit has a carrier belt tensioned for a plurality of rotation rollers. An opposite electrode unit is provided with a first electrostatic electrode, a corona electrode, and a second electrostatic electrode in this order from a supply side of the supplied subs...