In a data processing method, all information on a figure to be drawn, as vector-graphic data representing said figure, is transmitted to a drawing apparatus. The vector-graphic data is processed to form an image, as raster-graphic data representing the figure, and the run length data is extracted from the image. The run length data is grouped to become grouped run length data, and outline vector-graphic data, that is having a smaller data amount than that of the vector-graphic data, and that is ...

Disclosed is a work alignment apparatus for double-sided exposure of a work which serves to convey to and locate the work in an exposing position such that the work is exposed on either side thereof between printing frames each holding an image mask on each corresponding side of the work. The work alignment apparatus comprises means for detecting and calculating an amount of misalignment between the work in the exposing position and each of the image masks, an alignment stage disposed outside th...

In a multi-exposure drawing method for drawing a pattern on a drawing surface, using an exposure unit including a plurality of optical modulation elements arranged in a matrix manner, the unit is continuously and relatively moved at a constant velocity with respect to the drawing surface in an array-direction defined by a matrix-arrangement of the modulation elements. Optical modulation elements, spaced at a regular interval in an alignment of optical modulation elements along the array-directio...

A device for lighting a discharge lamp comprises a rectifier, a switching circuit having a semiconductor element to be connected to said rectifier; a direct power supplying circuit having a rectifying circuit and filtering circuit each connected to said switching circuit; and a discharge lamp and a starter which are connected after said filtering circuit; said starter having a transformer and a smoothing capacitor for generating a high voltage is provided, which has a circuit having a switching ...

An appropriate photochemical reaction is produced in electrodeposited photoresist applied to the surface of a board and to the inner wall surfaces of holes extending through the board, for improving the efficiency of the operation of image formation. Upper and lower ultraviolet illumination devices and upper and lower light condensers 34a, 34b are provided. Each ultraviolet illumination device has a discharge lamp 32 and a reflecting mirror 33. Each light condenser consists of a horizontal array...

The present invention is directed to a dielectric barrier discharge lamp capable of recovering reduced radiation efficiency by easily, quickly cleaning dust or discoloring of a discharge tube or replacing any defective discharge tube. For this end, an internal electrode 22 in a form of electrically conductive rod is inserted into a center hole of a dual discharge tube 20 having discharge gas filled in an internal space 21. Holders 40a and 40b are removably mounted on both ends of the internal el...

The solid state laser comprises the laser medium 11 for absorbing the pumping light 12 from the LD 10 and generating or amplifying the light having a predetermined wavelength and a heat sink comprising the first block 15a, the second block 15b and the third block 15c for aligning the laser medium 11, cooling the laser medium 11 and reflecting the pumping light 12. The laser medium 11 has an arcuate light incident surface A and a flat reflection portion. The pumping light 12 having a diffusing an...

To realize high irradiation efficiency and intensity stability for extending lifetime of the short-arc discharge lamp to be used for IC exposure apparatus or the like. For this end, mercury and rare gases are sealed in the inner space 21 of the discharge tube 1. The rare gases are a mixture of a relatively high molecular weight rare gas such as xenon, krypton, argon, etc. and 5%-40% by volume of a relatively low molecular weight rare gas such as helium, neon, etc. And pressure of the mixed rare ...

An apparatus for measuring hardness of an ultraviolet curing transformation agent comprising a stain of the present invention comprises a light source device for emitting beams including ultraviolet rays, an optical filter member through which the ultraviolet rays having a predetermined wavelength among the beams emitted from the light source device pass, and a measuring device for measuring electric conductivity of the ultraviolet curing transformation agent comprising the stain, provided at a ...

A work locating method for an automatic exposing apparatus is provided. In addition to a step of delivering a work Wa from a feed-in section onto an alignment table 13a on an alignment stand in a locating section which is provided separately from an exposing section, and subjecting the work Wa to an automatic alignment operation and a step of fixing the alignment table 13a mounting the work Wa thereon to a traverser 1 which is fixed with a photomask 8 and is displaced from the exposing section 3...