
A cleaning apparatus and method for removing debris from the seals of a pressurized enclosure, specifically a sputter load lock chamber. The cleaning apparatus includes a load lock replacement door, a cleaning tool, and a seal. The load lock replacement door includes a surface that seals the opening of the load lock chamber so as to maintain a desired vacuum pressure in the load lock chamber. The sealing surface supports a cleaning tool. The cleaning tool and the sealing surface are supported by...











