
A method for fabricating an NROM is described. A stacked nitride layer is formed on a substrate and then patterned to expose a portion of the substrate. An implantation is performed to form a buried bit line in the exposed substrate, and then an oxide layer is formed on the buried bit line by using wet oxidation. Thereafter, a gate oxide layer is formed in the periphery circuit region by using dry oxidation. A patterned polycide layer is formed on the substrate covering the stacked nitride layer...










