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Results for ATTORNEY: silicon valley patent group llp
Showing 1 - 10 of 253
Disclosed is a shielded water-proof joint connecting a first mating-based plug to an inner conduction wire having a second mating-based plug and a third mating based plug and transmitting/receiving a signal, comprising a first mating-based jack for receiving the first mating-based plug therein, a water-proof device wrapping the first mating-based jack, a second mating-based jack connected to the first mating-based jack and used for receiving the second mating-based plug therein, a printed circui...
In an overlay metrology method used during semiconductor device fabrication, an overlay alignment mark facilitates alignment and/or measurement of alignment error of two layers on a semiconductor wafer structure, or different exposures on the same layer. A target is small enough to be positioned within the active area of a semiconductor device combined with appropriate measurement methods, which result in improved measurement accuracy.
A residue detection system collects at least one of the spectrum and image from a measurement region on a sample. Spectral analysis is performed on the collected spectrum to determine whether residue is present and if so the thickness of the residue. The spectral analysis uses a calibration metric that correlates a monitoring parameter to the thickness of the residue. The monitoring parameter is at least one of the reflectance value at one or more of the local minima and maxima in the spectrum, ...
A device for measuring a flow of a fluid is provided. The device includes a base, a channel, and at least two electronic circuits. The channel is mounted on the base, flowing the fluid therein and having at least two sections, and the at least two electronic circuits are electrically connected to the respective at least two sections, detecting a respective variation signal corresponding to the respective at least two sections so as to obtain the flow according to the respective variation signal.
A well plate and its supporting devices provide capabilities found in larger fermenters, such as controlling the oxygen level, the pH level, and temperature of the contents of the well. The well plate includes a plurality of wells, each of which can be independently controlled. Apertures in the wells, for example, provide access for a gas supply and sensors within each well provide data relating to, e.g., oxygen and/or pH level in the well. A control system controls the gas supply for each well ...
A normal incidence reflectometer includes a rotatable analyzer/polarizer for measurement of a diffracting structure. Relative rotation of the analyzer/polarizer with respect to the diffracting structure permits analysis of the diffracted radiation at multiple polarity orientations. A spectograph detects the intensity of the spectral components at different polarity orientations. Because the normal incidence reflectometer uses normally incident radiation and an analyzer/polarizer that rotates rel...
A diffraction based overlay metrology system produces the overlay error independent of effects caused by local process variations. Generally, overlay patterns include process variations that provide spectral contributions, along with the overlay shift, to the measured overlay error. The contributions from process variations are removed from the determined overlay error. In one embodiment, the local process variations are removed by measuring the overlay pattern before and after the top diffracti...
A magnetic recording head tester uses closed loop control to accurately control the magnetic field that is generated to test the magnetic recording head. The closed loop control compares the value of the sensed magnetic field to the desired value of the magnetic field and adjusts the magnetic field accordingly. A magnetic field sensor used in the tester may be located in a position that has a substantially different magnetic field magnitude than is experienced by the magnetic recording head. The...
A system and method for efficiently and accurately determining grating profiles uses characteristic signature matching in a discrepancy enhanced library generation process. Using light scattering theory, a series of scattering signatures vs. scattering angles or wavelengths are generated based on the designed grating parameters, for example. CD, thickness and Line:Space ratio. This method selects characteristic portions of the signatures wherever their discrepancy exceeds the preset criteria and...
A set of magnets, e.g., electromagnets, are used to produce an in-plane magnetic field with respect to an article under test or manufacture. The set of electromagnets includes electromagnets that are positioned above and below the plane of symmetry respectively. The bottom electromagnets may be positioned below the surface of the chuck for example. The plane of the article and/or set of electromagnets are positioned so that the plane of symmetry approximately coincides with the article. The set ...
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