
A sensor unit is formed by a single integral body obtained by coupling a resiliently deforming portion with a base portion without interposing a soft material therebetween, and a force applied to a probe secured to a front end of the resiliently deforming portion is measured as a change in capacitance of a capacitor constituted by electrodes secured to opposing surfaces of the resiliently deforming portion and base portion. These electrodes are connected to a resonance circuit of a high frequenc...











