
The vacuum chuck, which is an accessory device for holding a workpiece in machining and inspection, has a suction head made of a porous sintered particles of a thermoplastic resin, e.g., a fluorocarbon resin, preferably, bonded to the chuck base. The suction head is free from the problem of unreliableness of holding of workpieces without the danger of damaging the workpiece. The outer peripheral surfaces of the sucking head are provided with an air-impermeable layer to increase the efficiency of...











