In a Y linear driving mechanism 6 for moving an X linear driving mechanism 8 in a direction Y by a linear motor comprising a stator 16 and a moving element 17, there is provided a drive transmission portion which is connected to the moving element 17 so as to transmit a driving force of the moving element 17, acting in the direction Y, through a moving plate 18 and a connecting member 25. A first air gap G1 is formed between the moving element 17 and the moving plate 18, and a second air gap G2 ...