A planar spectrograph for demultiplexing optical wavelength signals includes a monolithic substrate. The substrate has a diffraction grating etched therein. The diffraction grating is integrally formed in the substrate to be in operative relationship with input light to diffract and reflect the input light to a detector. A recess is formed in the substrate to accommodate a separate slab waveguide. A slab waveguide is dimensioned and configured to fit within the recess, and the waveguide guides i...

The present invention provides a method for inspecting a silicon wafer making it possible to identify and efficiently detect a new defect affecting a device fabricating process, a method for manufacturing a silicon wafer enabling manufacture of wafers not having the defect, a method for fabricating a semiconductor device using the silicon wafer not having this defect, and the silicon wafer not having the defect. When a silicon wafer is inspected, inspection is made for a defect having the entire...

A method for the stereophotogrammetric survey of a large-dimension object is provided in which the object and a chain having two reference markers thereon spaced apart at a known distance are photographed from a height of about 30 m with two synchronized metric photographic cameras spaced apart by about 6 m. Depth measurements (Z axis) are made on a stereoscopic model reproduced by a stereoplotter at eight sets of points grouped in the eight conventional perimetral locations of photogrammetric o...

A method, apparatus, and computer program product for implementing inspection recipe services are provided. The apparatus includes a test structure including a semiconductor substrate and a number of arrays disposed on the semiconductor substrate. The arrays are linearly arranged and spaced equidistant. Each of the arrays corresponds to a reticle field and includes a number of cells. The test structure also includes a defect programmed into every third array. The defect is programmed in the same...

Signals indicative of the Sagnac phase shift between counterpropagating waves in a sensing loop are combined to produce an error signal. A phase modulator is arranged to modulate the phase of optical signals that pass through the sensing loop. A phase modulator driver apparatus responsive to the error signal produces a ramp signal to drive the phase modulator to null the error signal. A reset apparatus is arranged for resetting the ramp signal to when the phase reaches a predetermined limit. The...

The invention relates to the use of collagen for the production of a drug for the treatment of degenerative articular processes. An injection suspension is preferably produced, which contains collagen and possibly a local anaesthetic. This injection suspension is applied into the affected joints by means of an injection.

A wafer-cleaning module is disclosed for removing contaminants from a semiconductor wafer prior to measurement in a metrology tool. The cleaning module includes a heating chamber including a heater plate for heating the wafer by conduction. A separate cooling chamber is provided to cool the wafer. The system is controlled by a processor so the heating cycle, cooling cycle and the time periods between these cycles and the measurement cycle are uniform for all wafers.

In an optical fiber gyroscope, the sensitivity thereof is optimized with a phase bias afforded by utilizing the phase characteristics of an optical branching/coupling unit. Further, the fluctuation of the intensity of a light source and the error and secular change of the phase characteristics of the optical branching/coupling unit are compensated by an electronic circuit. Moreover, an optical fiber loop is located in a heat insulation casing so as not to be affected by an ambient temperature ch...

A sensor which makes use of a non-reciprocal optical effect, such as the Sagnac effect has a passive ring resonator defining a closed light path. Light from a broadband light source is coupled to the passive ring resonator by 2.times.2 couplers in a first direction of propagation and a second direction of propagation opposite thereto. The 2.times.2 couplers also couple light out of the passive ring resonator. A 3.times.3 optical coupler is provided, by which light having circulated in said ring ...

A backscatter or secondary wave error reducer for an interferometric fiber optic gyroscope having at least one phase modulator for receiving a square wave bias phase modulation signal and a sine wave carrier suppression modulation signal. The amplitude of the carrier suppression modulation signal is sufficient to greatly reduce the interference between two sets of backscattered or secondary waves of light originating in the Sagnac loop of the gyroscope. Reduction or elimination of the interferen...