
A light beam is projected on a reference plane and an object to-be-measured, a phase difference between reflected lights from them is changed by a phase shifter, a drive voltage for causing the change of the phase difference is applied to the phase shifter, a magnitude of phase shift of the phase of the reflected lights is detected by a phase shift detector on the basis of the drive voltage at a point of time at which the change of the phase difference of the reflected lights has been compensate...











