In a device manufacturing method and lithographic apparatus wherein a pattern is transferred from a patterning device onto a substrate, a measurement target is provided on the substrate in a process enabling execution of a substrate measurement using radiation of a first wavelength. Subsequently the measurement target is transformed in a grid of conducting material, the grid having grid openings which are smaller than the first wavelength. The space in the scribe lane where the measurement targe...

Apparatus and method for inspecting the interior surfaces of devices such as vessels having a single entry port. Laser energy is introduced into a device under test and to a time delay. Light reflected from the interior surfaces of the device under test is introduced into one end of a dye-cell and the time-delayed light is introduced into the other end. The amount of time delay is adjusted to produce two-photon fluorescence in the dye-cell so that the amount of time delay is representative of th...

An assembly includes a platform for supporting and moving a tire along therealong. A light emitter of a first detection assembly transmits a first signal from emitter around the tire in to determine the height of the tire. A light receiver of the first detection assembly receives the transmitted first signal passed around the tire and forwards the first signal to a controller for evaluating the first signal and for determining a first configuration of the tire. A light emitter of a second detect...

An apparatus and a method for detecting low frequency specular surface flaws on coated substrates is disclosed. A method for detecting low frequency specular surface flaws may comprise: impinging visible electromagnetic radiation or light from an electromagnetic radiation source onto the coated substrate at an oblique angle, reflecting the visible electromagnetic radiation off the coated substrate onto a screen material to form a specular surface flaw reflected image, and recording the reflected...

A surveying instrument, comprising a distance measuring unit for measuring a distance to a collimating point, an angle measuring unit for measuring a vertical angle and a horizontal angle of the collimating point, an image pick-up means for acquiring an image in a collimating direction, a driving unit for directing the image pick-up means in a direction of a predetermined object to be measured as selected based on an entire image data acquired by the image pick-up means, and a control arithmetic...

A shape measuring apparatus includes a point light source including a white light-emitting diode, a collimator lens for forming a parallel beam as a result of causing light emitted from the point light source to be incident upon the collimator lens, a telecentric lens device, including two-side telecentric optics or object-side telecentric optics, for being irradiated with the light that has passed an object to be measured from the collimator lens, and an image sensor for projecting thereon an i...

A method for mapping includes projecting a primary speckle pattern from an illumination assembly into a target region. A plurality of reference images of the primary speckle pattern are captured at different, respective distances from the illumination assembly in the target region. A test image of the primary speckle pattern that is projected onto a surface of an object in the target region is captured and compared to the reference images so as to identify a reference image in which the primary ...

Raman spectrometers are employed in a hydrocarbon processing plant for online measurement of at least one compositional property of a hydrocarbon stream. The Raman spectrometers can be used to control separations equipment, determine energy content, and/or determine flow rate. The Raman spectrometers are especially advantageous when employed in a liquefied natural gas (LNG) plant to determine properties of cooled natural gas streams.

A system for measuring a profile of an object comprising a source creating a beam of electromagnetic energy. An electromagnetic beam receiver spaced from the source for processing an output signal proportional to the girth of the object being measured. A platform for providing rotational and vertical movement of the object being measured causing the object to obstruct a portion of the electromagnetic beam generated by the source. A processor for processing the output signal from the electromagne...

A method for polishing wafers includes polishing a process layer formed on a wafer, the process layer overlying a grating structure; illuminating at least a portion of the process layer and the grating structure; measuring light reflected from the illuminated portion of the process layer and the grating structure to generate a reflection profile; comparing the measured reflection profile to a target reflection profile having an acceptable degree of planarity; and terminating the polishing of the...