The present invention relates to a method and apparatus for measuring the position of a ferrule of a laser module. The apparatus comprises an XYZ stage, a base, a receiving portion and a laser displacement meter (LDM). The XYZ stage is used for moving in three-dimensional directions. The base has a first slot by which the base is detachably connected to the XYZ stage. The receiving portion is fixed to the base and has a second slot. The laser displacement meter is used for measuring the distance...

A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in a partitioning member for partitioning said first space and space outside said first space, wherein s...

Positions of a plurality of objects in a space are detected. A position of reflected light of an object passing through an infrared screen is specified by analyzing an image obtained by selectively imaging the infrared rays. When the infrared screen is formed in front the display, reflected light is only caused just in front of the display. When the infrared rays are selectively imaged, a picture displayed with visible light is separated from reflected light in the infrared region, and only the ...

The present invention provides a compact optical probe assembly that measures ultrasound in materials. The probe uses angle-terminated optical fiber to direct illumination laser light at the surface of a remote target. Ultrasonic displacements at the surface scatter the illumination laser light. Angle-terminated optical fibers collect phase modulated light and direct the phase modulated light to an optical processor to produce a signal representative of the ultrasonic surface displacements. The ...

A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which a spot of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a beam splitter by which the laser beam with the spot formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed so as to irradiate the work held on the chuck ta...

An angular magnification effect of diffraction is exploited to provide improved sensing and scanning. This effect is most pronounced for a normal or near-normal incidence angle in combination with a grazing diffraction angle, so such configurations are preferred. Angular sensitivity can be further enhanced because the width of the diffracted beam can be substantially less than the width of the incident beam. Normal incidence configurations with two symmetric diffracted beams are preferred, since...

An optical measuring device (20) for measuring a micro displacement or a micro vibration of an object (28) includes a laser emitter (21), an amplifying lens module (23), and a photoelectric sensor (25). The laser emitter is configured for emitting a laser beam at the object so that the object reflects the laser beam and forms a beam reflection. The amplifying lens module is disposed between the photoelectric sensor and the object for the beam reflection passing there through. The amplifying lens...

A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therew...

The invention relates to systems and methods for measuring workpieces. In one embodiment of the invention, a system for measuring a workpiece includes a plurality of measurement modules, an electronic control module, and a moveable frame to which the measurement modules are attached. Each of the measurement modules comprises at least one galvanometer, at least one mirror, and at least one optical displacement sensor. The plurality of measurement modules are collectively adapted to measure a circ...

An apparatus for detecting error of a transfer system that is adapted for detecting an error of a transfer system transferring a substrate loaded upon fabricating of a flat panel display device in a real time is disclosed. In the apparatus, an emitter generates a light and radiates the light into a transfer system. A receiver receives light reflected from the transfer system. A controller controls light radiation from the emitter, and measures the time such that a reflective light of the transfe...