A method to create a low resistivity P+in-situ doped polysilicon film at low temperature from SiH.sub.4 and BCl.sub.3 with no anneal required. At conventional dopant concentrations using these source gases, as deposition temperature decreases below about 550 degrees C., deposition rate decreases and sheet resistance increases, making production of a high-quality film impossible. By flowing very high amounts of BCl.sub.3, however, such that the concentration of boron atoms in the resultant film i...

A film deposition method and film deposition system for depositing a halogen compound film, capable of depositing such a film while suppressing abuse that occurs due to deficiency of a halogen element even if the halogen element is dissociated from a film material. The halogen compound film is deposited through a process including: evaporating a film material comprising a halogen compound by means of an evaporation source 3; ionizing the evaporated film material with a radio frequency power outp...

Silica granules made up of mutually agglomerated silica soot particles are treated by placing the granules in a crucible inside a furnace which contains an inert gas mixed with a chlorine-containing compound and in which the temperature lies in the range 1000.degree. C. to 1500.degree. C. According to the invention, a crucible is used that is made of porous graphite firstly to increase the surface area of the crucible through which the chlorine-containing compound diffuses. This gives rise to fa...

A process of treating natural rubber latex articles, such as gloves and condoms, to alter the characteristics of the article so as to improve its barrier properties and resistance to passage of harmful agents therethrough, and the article produced by the process. The article is manufactured in accordance with conventional methods and then treated with a reactive gas, in particular a halogen gas such as fluorine gas, or a mixture of gasses. The treatment is conducted in a sealed chamber in accord...

A process for forming an oxidation and corrosion resistant coating on selective surfaces of an airfoil providing a chamber having an external wall which receives a hollow sleeve for defining an internal space and an annular space between the external wall and sleeve. The airfoil to be coated is located within the internal space. An activator is provided in the internal space below the airfoil. The chemical coating composition is located in the annular space. The chamber is closed and heated to a...

The present invention provides a chemical vapor deposition using, as feed gases, a silicon compound and hydrazine or a derivative thereof, or a compound containing both silicon and nitrogen, and a process and a system useful for chemical vapor deposition growth, in which a chlorinated silane compound and ammonia, feed gases, are preliminarily reacted with each other, and the resulting reaction gas mixture from which the ammonium halide produced by the preliminary reaction has been eliminated is ...

A chemical vapor deposition process for laying down an aluminum oxide coating on a glass substrate through the use of an organic ester having a .beta. hydrogen on the alkyl group bonded to the carboxylate oxygen and an inorganic aluminum halide. The resulting article has an aluminum oxide coating which can be of substantial thickness because of the high deposition rates attainable with the novel process. Preferably, the coating deposition rates resulting from the method of the present invention ...

A method of depositing a Group IV metal-containing film on a substrate by conveying one or more of certain Group IV organometallic compounds in a gaseous phase to a deposition reactor containing a substrate and decomposing the one or more Group IV organometallic compounds to form a film of a Group IV metal on the substrate is provided. Such Group IV metal-containing films are particularly useful in the manufacture of electronic devices.

A transparent, monolithic or laminated sheet material based on a methyl methacrylate homopolymer or copolymer, the laminated material having at least one of its two outer layers made of the methyl methacrylate homopolymer or copolymer, characterized in that the monolithic sheet of methyl methacrylate homopolymer or copolymer or at least one outer layer of methyl methacrylate homopolymer or copolymer of the laminated sheet has, in the region of the surface, over a depth of at least 50 nanometers ...

A chemical vapor deposition (CVD) system and method for applying an aluminide coating constituted by two or more extrinsic metal components on a jet engine component. The aluminide coating is capable of forming a protective complex oxide upon subsequent heating in an oxidizing environment. At least one of the extrinsic metals in the aluminide coating is provided as a first vapor phase reactant from a receptacle coupled by a closed communication path with the reaction chamber of the CVD system an...