A position-detecting device comprising a scale, a first photo-interrupter, and a second photo-interrupter. The scale is attached to a movable member, and has a plurality of slits arranged at regular intervals. Each photo-interrupter includes a light source and a light detector, which are located at opposing sides of said scale, respectively. The first and second photo-interrupters are spaced apart such that when the scale moves, they generate, respectively, a first signal and a second signal whi...

This invention aims to facilitate observation and structural analysis of crystal grains of aluminum wiring. In the process, a protective film of a semiconductor device is removed by dry etching. Next, said semiconductor device is inclined and rotated and an aluminum alloy film or laminated aluminum alloy film of the semiconductor device is scanned with a focused ion beam. Then, said aluminum alloy film or laminated aluminum alloy film is scanned with a cantilever, atomic force between said alumi...

According to a sheet feeding method capable of successive image formation for use in an image formation apparatus with a sheet transport path for an upper sheet feeding cassette also serving as a portion of a sheet transport path for a lower sheet feeding cassette, the lower sheet feeding cassette initially starts feeding sheets. When the lower sheet feeding cassette runs out of sheets, a request is signaled to resupply sheets to the lower sheet feeding cassette and the upper sheet feeding casse...

A color developer solution capable of inhibiting precipitation or tar-staining occurring in the processing tank or the roller rack, even when being processed rapidly or at low replenishing rate and a concentrated composition thereof is disclosed, comprising at least one selected from specified N-disubstituted hydroxylamine derivatives and at least one selected from specified N-monosubstituted hydroxylamine derivatives in a molar ratio falling within the range of 1000:1 to 1:1.

A toner for electrophotography comprises a resin, a colorant and a charge controlling agent, wherein the charge controlling agent is substantially present on a surface part of the toner, and wherein the toner has a saturated charge quantity (absolute value) of from about 10-40 .mu.C/g when the toner is mixed with a carrier which is coated with a silicone resin, and a carrier contamination degree not greater then about 20%.

A non-stop toll collection system has a plurality of road-side radio apparatuses having mutually different radio communication regions, which transmit identification signals responsive to the installation locations thereof, a vehicle-mounted apparatus, which receives an identification signal, records a communication log for each road-side radio apparatus, in response to the identification signal, and transmits the communication log, wherein each of the plurality of road-side radio apparatuses re...

An electron-beam exposure system is constructed using electromagnetic lenses, apertures and an electron-beam mask, which are arranged and aligned in line between an electron source and a substrate. Within a trajectory of an electron beam that is radiated from the electron source and is then irradiated onto the substrate, crossover planes emerge with respect to electrons of the electron beam. The electron-beam mask is arranged at one crossover plane, while the aperture is arranged at another cros...

The present invention relates to a method of forming a mask with an opening pattern used for a charged particle beam exposure; which comprises the steps of: outlining a pattern figure represented by prescribed pattern data; descerning whether every polygonal pattern represented by pattern data being obtained through said contouring is a convex polygon or not; splitting every polygonal pattern which is not identified as a convex polygon into a plurality of pattern sections; and distributing a plu...

A plurality of roadside wireless devices are provided on a roadside of an entry of a toll area. A first roadside wireless device, which communicates with a vehicle-mounted device over wireless communication, sends unique information obtained from the vehicle-mounted device to a second roadside wireless device located, downstream to the first roadside wireless device, along a moving direction of the vehicle. The second roadside wireless device checks if unique information on the vehicle-mounted d...

A scattering-angle limiting type electron-beam exposure method in which a mask having a scattering region is used, and a limiting aperture is set to control the amount of electrons scattered by the mask that pass through the limiting aperture, whereby a scattering contrast is formed from differences in the scattering angles of electrons. By changing the thickness of the scattering region of the mask according to the pattern density, the scattering angles of the scattered electrons are controlled...