In a film-fabricating apparatus, a reaction chamber and a film-forming chamber which contains a substrate on which a film is deposited are provided. Two chambers are communicated with each other by a communication device which allows for the conduction of activated molecular species grown in the reaction chamber to the film-forming chamber, and prevents light beams emitted during the decomposition of raw gas from being carried into the film-forming chamber. A first cylinder is connected to the r...

A barrier layer of amorphous silicon carbide is formed on aluminum drum, and a photoconductive layer formed of a mixture of para-.mu.c-Si and a-Si is formed on the surface of the barrier layer. An a-Si surface layer is formed on the photoconductive layer. When the electrophotographic photoreceptor is exposed to a light ray, carriers are generated by the ray, which is visible or has a near-infrared wavelength, due to a smaller energy gap of the para-.mu.c-Si in the layer.

An electrophotographic photosensitive member has high sensitivity with respect to long-wavelength light, since it is formed of amorphous silicon containing hydrogen. A surface layer has excellent charge-retaining properties, since it is formed of microcrystalline silicon containing at least one element selected from the group consisting of carbon, nitrogen, and oxygen. A barrier layer is formed of boron nitride or of microcrystalline silicon containing at least one element selected from among th...

A film depositing apparatus forms a film with a given thickness on each of a plurality of bases. The apparatus is provided with a casing removably mounted on a base section to form a film depositing chamber whose interior is isolated from the outside space; transfer mechanism for transferring the plurality of bases in one direction inside the film depositing chamber; gas supplying mechanism for feeding material gas into the casing, the gas supplying mechanism including injecting portions arrange...

An electrophotographic photoreceptor comprising a conductive substrate and a photoconductive layer disposed on the conductive substrate to generate photocarriers upon light radiation. The photoconductive layer comprises a charge-generating layer and a charge-retaining layer. At least part of the charge-generating layer has a plurality of thin microcrystalline semiconductor layers containing silicon as a major constituent and at least one element selected from the group consisting of carbon, hydr...

An electrophotographic photoreceptor constituted by a conductive substrate, and a photoconductive layer, provided on the conductive substrate, for generating photocarriers upon radiation of light is disclosed. The photoconductive layer has a charge-generating layer and a charge-retaining layer. The charge-generating layer comprises a semiconductor containing silicon as a major constituent. The charge-retaining layer comprises a multilayered body constituted by alternately stacking first amorphou...

An electrophotographic photoreceptor is constituted by forming a barrier layer, a photoconductive layer, and a surface layer on an aluminum substrate drum, in the order stated. The photoconductive layer of this electrophotographic photoreceptor has a superlattice layer of a hetero-junction constituted by alternately stacking thin a-Si:H layers and thin .mu.c-SiC:H layers. In this superlattice structure, the optical bandgaps of the respective layers differ from each other, a-Si:H serves as a pote...

An electrophotographic photoreceptor includes a conductive substrate and a photoconductive layer, provided on the conductive substrate, for generating photocarriers upon light radiation. At least part of the photoconductive layer contains and has a plurality of thin microcrystalline semiconductor layers containing silicon as a major component, and at least one element selected from the group consisting of carbon, oxygen, and nitrogen. The adjacent thin microcrystalline semiconductor layers have ...

An electrophotographic photoreceptor is constituted by forming a barrier layer, a photoconductive layer, and a surface layer on an aluminum substrate drum, in the order stated. The photoconductive layer of this electrophotographic photoreceptor has a superlattice structure constituted by alternately stacking thin a-SiC:H layers having carbon contents different from each other. In this superlattice structure, the optical bandgaps of the respective layers differ from each other, a-SiC:H having a h...

An electrophotographic photoreceptor is constituted by forming a barrier layer, a photoconductive layer including a charge-generating layer and a charge-transportation layer, and a surface layer on an aluminum substrate drum, in the order stated. The charge-generating layer of this electrophotographic photoreceptor has a superlattice structure of a heterojunction constituted by alternately stacking thin a-Si:H layers and thin .mu.c-SiC:H layers. In this superlattice structure, the optical bandga...