Disclosed is an alignment method which includes measuring a deviation between a design position and a measurement position, with respect to some of plural alignment execution points upon an object, to be examined, which alignment execution points have predetermined design positions, respectively, applying design positions of some alignment execution points and measured positional deviations to an approximation formula which approximates the relation between design positions and corrected positio...

An alignment method and system in which substrates having zones, to be aligned and being disposed in a predetermined array, are supplied sequentially and in which in each substrate the zones are brought into alignment with a predetermined reference position sequentially. Deviations in the positions of the zones of a first substrate with respect to positions determined in accordance with the predetermined array, are measured in sequence, and the actual array of the zones through the measurement i...

An alignment apparatus, which is used when positioning and joining a plurality of workpieces relative to each other, each workpiece having a plurality of alignment marks for alignment, the alignment apparatus includes: a transparent mask provided with reference marks with which the alignment marks are aligned; a mirror disposed between the mask and the workpiece; an optical unit having an optical axis pointed in a direction of the mirror via the reference mark from a side of the mask opposite to...

An alignment fixture comprising a wafer carrying member which is moveable relative to a base and which is interconnected thereto by means of three pivotably mounted levers which are moved about their pivots by micrometers.

An apparatus comprising a probe element for aligning and for checking the alignment of a tool, or the like, with respect to a work piece. The tool is moved into engagement with the probe element thereby activating indicators which are provided on the probe to provide a manifestation of alignment or mis-alignment. Once the tool, or other element, has been aligned it usually will maintain this condition during a normal period of use.

A device for ascertaining axial and/or radial misalignment between the flanges of the power outlet or driving shaft of a large engine or heavy machine and the input or driven shaft of a massive accessory drive, i. e., a speed increaser or the like, with the flanges, not being intended to be mated one to the other directly but being rotatably connected by a high speed gear-type coupling, or the like. The device includes a pair of pointed rods which are suitable supported inwardly thereof, the poi...

This alignment system utilizes intermediate photodetectors having central apertures and a terminal photodetector, each photodetector having four quadrants of active area, with their centers aligned on the axis of a laser beam, their output signals being utilized to indicate alignment, or the degree of mis-alignment, of their centers with respect to the axis of the laser beam. Alternatively their output signals are utilized to drive servo systems that automatically move the quipments on which the...

An electro-optical alignment telescope is disclosed which is adapted to detect lateral displacement of an object having a retroreflector mounted thereon by imaging an illuminated nose portion of a truncated prism on such reflector and imaging back the reflected light on the prism. Light reflected from the sides of the prism is detected and measured to provide information on the amount and direction of lateral displacement.

An alignment assembly for indicating the angle of incidence with respect to a workpiece including attachment means adapted to be attached to a device such as a portable hand drill. The assembly includes a central shaft interconnecting two balls. The ball at one end supports an input member for pivotal movement about the center of the ball while the ball at the other end supports an indicator member for pivotal movement about the center thereof. Three rods engage and interconnect the input member...

In an alignment instrument of the type in which a support or fixed instrument portion pivotally mounts a movable instrument portion, which may be a telescope, laser tube or the like, the movable portion is swingable through an arc from a reference axis to a second axis in alignment with a point of interest. A device capable of responding to the accompanying change in linear distance between the fixed and movable instrument portions is mounted to such portions and undergoes relative linear moveme...