The first chamber cleaning gas and the first silicon-containing film-etching gas of the present invention comprise at least one compound selected from the group consisting of FCOF, CF.sub.3 OCOF and CF.sub.3 OCF.sub.2 OCOF, and O.sub.2 in the specific amount, and optionally other gases. The second chamber cleaning gas and the second silicon-containing film-etching gas comprise CF.sub.3 COF, C.sub.3 F.sub.7 COF or CF.sub.2 (COF).sub.2 and O.sub.2 in specific amounts, and optionally may comprise o...

A process for producing a purified gaseous product from a gaseous feedstream such as air containing impurities is disclosed. The impurities such as hydrogen, water vapor, carbon monoxide and carbon dioxide are removed from the gaseous feedstream in a vessel having layers of adsorbents and oxidation catalysts. The placement of the hydrogen to water vapor conversion catalyst downstream of the step of contacting the feedstream with a catalyst to convert the carbon monoxide to the carbon dioxide and...

A cover gas composition for protecting molten magnesium/magnesium alloy includes a fluorine containing inhibiting agent and a carrier gas. Each component of the composition has a Global Warming Potential (GWP) (referenced to the absolute GWP for carbon dioxide at a time horizon of 100 years) of less than 5000.

A filter for gases, particularly for ventilation, is provided with elongated flow channels (3) which are at least partly formed by superimposing material layers (1) between which the flow channels (3) are formed so that their starting ends are open to a gas inlet (A) and their terminal ends are open to a gas outlet (B), wherein the gas flow between the starting ends and the terminal ends in the channels (3) is arranged parallel to the planes of the material layers (1), and the layers contain an ...

Carbon monoxide (CO) is removed from a nitrogen and CO containing gas stream such as feed air to an air separation process for recovery of a nitrogen product gas stream or a nitrogen product gas stream from an air separation process by adsorbing CO from said gas stream before or after separation of oxygen from said gas stream to produce a product gas stream containing less than 5 ppb of CO by contacting said gas stream With a solid adsorbent such as a Mn, Fe, Ni, Cu, Ag, Pd, Co, Pt or Au exchang...

A filter is disclosed for treating a gaseous stream to remove therefrom undesirable components, especially from exhaust gases of engines, and particularly from internal combustion engines, such as, for example, Diesel engines and the like. The filter includes a filter body or element having a plurality of inlet and outlet channels, with the inlet channels being separated from the outlet channels by walls or partitions to provide reaction chambers. The filter body is made a high-temperature-resis...

A flowmeter for gases has a rotor between two stators which consist of deflection blades, and an otpical system for detecting the rotation of the rotor and converting it into an electrical output signal. Each of the detector blades of the stators has a curved course between an inflow edge, where the blade from the hub to the periphery runs substantially in an axial plane, and an outflow edge, where the blade surface at each point thereof forms an angle with the axial direction which angle varies...

Carbon monoxide is removed from air prior to cryogenic separation of oxygen and nitrogen. Feed air is compressed and the heat of compression is used without further heating to drive catalytic oxidation of CO to CO.sub.2 over a Pd and/or Pt on alumina catalyst followed by adsorption of water initially present and then either adsorption of hydrogen or oxidation of hydrogen to water and its removal by adsorption, along with carbon dioxide.

Carbon dioxide, water, carbon monoxide and hydrogen are removed from a gas stream such as air or nitrogen by adsorbing water and carbon dioxide on a solid absorbent of alumina, or zeolite and oxiding carbon monoxide over a solid catalyst to carbon dioxide and adsorbing the resulting carbon dioxide and chemisorbing the hydrogen on the catalyst, which may be palladium on alumina.

An improved oxygen-enhanced Claus process for the recovery of sulphur from an acid gas comprising hydrogen sulphide as a furnace in which a part of the hydrogen sulphide content of the acid gas is burned to form sulphur dioxide. The sulphur dioxide then reacts with residual hydrogen sulphide to form sulphur vapor which is condensed out of the resulting gas mixture. One part of the residual gas mixture is then subjected to catalytic stages to bring the reaction between the hydrogen sulphide and s...