A dressing apparatus dresses a polishing surface of a polishing table used for polishing a workpiece such as a semiconductor wafer in a polishing apparatus. The dressing apparatus comprises a dresser having an elongate dressing surface for dressing the polishing surface, and the dressing surface has a flat surface which contacts the polishing surface. The dressing surface also has one of a tapered surface extending from the flat surface and inclined so as to be directed away from the polishing s...

A dressing apparatus is used for dressing a polishing surface of a polishing table used for polishing a workpiece such as a semiconductor wafer. The dressing apparatus for dressing apparatus comprises a dresser having a dressing surface for dressing the polishing surface, and the dressing surface has an area which covers an entire area of the polishing surface.

A shutter apparatus is provided wherein openings for defining a secondary aperture are formed in respective shutter blades, such that an amount of light transmitted through the secondary aperture is detected, and the drive force for driving the shutter blades is changed so that the amount of the received amount increases in the opening stroke according to a predetermined function. When the integrated quantity of the received light reaches a threshold value, the movement of the shutter blades is ...

A driving apparatus includes a permanent magnet magnetized so as to have a plurality of poles, a coil for making a magnetic field by the application of a voltage thereto, and creating a force between itself and the permanent magnet, the force created between the coil and the permanent magnet driving an object to be driven, a position detecting means for detecting the position of the object to be driven by using a magnetic flux of the permanent magnet, and a feedback circuit for feeding back info...

A driving apparatus for moving an object has a stage which moves the object mounted thereon, a base member supporting the stage, a reaction force reception structure for receiving a reaction force generated upon driving the stage, a damp member for damping transmission of vibration with a predetermined frequency range from the reaction force reception structure to a floor and an actuator for generating a force between the base member and the reaction force reception structure.

An illumination apparatus illuminates a surface to be illuminated, by use of a light source, a secondary light source forming system for forming a plurality of secondary light sources from light emitted from the light source, and a lens system for forming a conjugate plane conjugate with a light entrance plane or a vicinity thereof of the secondary light source forming system after a color separation system for separating light from the secondary light source forming system into three beams of m...

In an exposing apparatus for copy transferring a pattern formed on a mask onto a substrate, the substrate is supported on a leveling stage mounted on a two-dimensionally movable stage. Two-dimensional deviation amounts of the substrate in relation to the moving stage, caused by inclination of the leveling stage, are detected and are compensated by controlling the movement of the moving stage, thereby correcting the relative positional relation between the mask and the substrate.

In a heat roll consisting of a mandrel and a surface layer, this invention comprises a fixing apparatus and a recording apparatus, wherein a thickness of the surface layer is formed not exceeding the thickness determined by a square root of the product of a heat diffusion rate of the surface material and a nip time required for a form to pass a nip zone, and a thickness of the mandrel is formed not less than the thickness determined by a square root of the product of a heat diffusion rate of the...

In a facsimile apparatus equipped with a plurality of printing paper cassettes or trays for accommodating printing paper on which an output image is to be printed, the apparatus has designation means for designating one of the plurality of printing paper cassettes or trays as a special cassette or tray for accommodating separating paper in accordance with user's operation, and the special cassette or tray is controlled so that the paper accommodated in the special cassette or tray is not used to...

A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm member. A pair of fingers, used for conveying a work, are attached to the respective rotatable pulleys. A driving force transmission member is engaged with the stationary pulley and the rotatable pulleys. When the arm member is rotated, the driving force transmitting means rotates the rotatable pulleys in a...