A substrate is held on a spin chuck, and resist solution is supplied to the surface of the substrate at a plurality of positions spaced at predetermined intervals from a plurality of resist nozzles provided the bottom surface of a resist pipe provided over a first direction across the surface of the substrate. Thereafter, the substrate is oscillated or rotated, thereby making the resist solution on the substrate a thin coating film with a uniform thickness. In the coating apparatus and method, w...

A closed space is formed in a reduced pressure drying station, and the closed space is brought to a vacuum state. In this state, an EB unit irradiates a wafer mounted on a hot plate with an electron beam to foam an insulating film material. Subsequently, the hot plate is raised to a predetermined temperature, and drying processing is performed under a reduced pressure. As described above, since the foaming processing is performed in the reduced pressure drying station, bubbles remain in the insu...

In a coating device, a nozzle is configured by combining a front block and at least one back block. A front block includes a portion which is projected toward the base member with respect to the back block, and a top face of the projected portion is processed into a curved face having a predetermined curvature radius. A top face of the back block, which is opposed to the base material, is processed into a flat face, and a plurality of discharging openings are provided therein for discharging a c...

The invention provides a coating composition comprising (A) a vinyl resin having a structure of 2-(2'-hydroxyphenyl)-benzotriazole in the resin skeleton and (B) a crosslinking agent, and a coating method using the coating composition. The coating composition of the invention is capable of forming coating films which are improved in acid resistance, weatherability and other properties without impairment of finished appearance and processability.

Disclosed is a coating apparatus, comprising: a first stream-combining valve communicating with each of a first solvent tank and a resist solution tank, a first pump for supplying an initial resist solution from the resist solution tank toward said first stream-combining valve, a second pump for supplying a solvent from said first solvent supply toward said first stream-combining valve, a first mixer for mixing under stirring the initial resist solution flowing out of said first stream-combining...

A device for the application of a liquid or viscous coating medium onto a moving material web, specifically a paper or cardboard web, includes a curtain coater to apply the coating medium in the form of a curtain or veil to the material web and a suction device to remove air which is carried along by the material web and/or the veil of coating medium. A dynamic pressure analyzer determines the pressure of the air that accumulates before the line of contact of the curtain of coating medium with t...

In order to supply a coating to a roller, a coating supplying groove is provided along only one side of a core which is connected to an end of a support so as to act as a shaft of a roller. A coating reservoir between the roller and the core is located to one side of the core. To permit engagement and disengagement between the support and the core, an elastic member is mounted within a coating flowing hole of the core, while an inserting groove and a stopping groove are provided in the inner per...

A coating composition for thick coating prepared by adding an aggregate to a coating liquid containing 5 to 40% by weight as SiO.sub.2 of a coloidal silica and 3 to 40% by weight of dissolved and/or finely dispersed organic polymer, having an SiO.sub. 2 /M.sub.2 O mole ratio (in which M is a monovalent alkali metal atom) of at least 7, and having a viscosity lower than 100 c.p. at 20.degree. C when kept in the sealed state at 50.degree. C for 10 days. Said coating composition being especially su...

Disclosed is a coating apparatus, comprising: a first stream-combining valve communicating with each of a first solvent tank and a resist solution tank, a first pump for supplying an initial resist solution from the resist solution tank toward said first stream-combining valve, a second pump for supplying a solvent from said first solvent supply toward said first stream-combining valve, a first mixer for mixing under stirring the initial resist solution flowing out of said first stream-combining...

Application apparatus for the coating of a travelling web (5), comprising a support roll (3) and a predosage roll (7'), said rolls forming a nip between themselves through which the web is brought to travel, further comprising an application device (21) by which sizing agent or coating agent (13) can be transferred onto the web, and means (19) for final evening of material applied onto the web, characterized in that the application device (21) is designed in such a manner that it transfers direc...