
A method of providing doped material on a substrate by chemical vapour deposition using a reactive gas. Variations in the doping level are obtained by displacing the doping source along a flow of non-reactive gas having a constant supply in order to vary the amounts of dopant converted to the vapour phase due to retrodiffusion of reactive vapours towards the doping source. Application to semiconductor devices in particular of the III-V type, especially for high-frequency devices.











