An electrostatic encoder comprising receiving coupling electrodes formed on a scale, and extending in a predetermined direction, transmitting coupling electrodes provided on a sensor head, and located to face the receiving coupling electrodes, digital electrodes provided on the scale to extend from the receiving coupling electrodes in a direction perpendicular to the predetermined direction, and arranged at a predetermined pitch, two pairs of interdigital electrodes provided on the sensor head, ...

An electrostatic chuck is provided in which a lower oxide coating, an electrode, and an upper oxide coating are formed on a substrate. The lower oxide coating is formed by spraying an oxide of Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu and has a dielectric strength of 15-50 kV/mm.

An electrostatic filter having an improved dielectric is described. The dielectric constitutes a dielectric mat formed from high porosity non-woven fibers having pores that have a void fraction of at least 97%. The dielectric mat is sandwiched by a pair of porous electrodes. The fibers that form the mat have a maximum cross sectional thickness that is less than 100 microns and a length to maximum thickness ratio of greater than 10. The pores are preferably statistically substantially equally siz...

The object of the present invention is to provide an electrostatic chuck in which the surface can be kept smooth after being exposed to plasma, so as to protect a material to be clamped such as a silicon wafer from being contaminated with particles, and which is excellent in clamping and releasing a material to be clamped. According to the present invention, there is provided an electrostatic chuck comprising a dielectric material in which alumina is 99.4 wt % or more, titanium oxide is more tha...

Electrostatic precipitators, including wet electrostatic precipitators, having a bank of conductive tubes which receive a gas stream having entrained particulates and an electrode connected to an electric current, wherein the tubes each include an internal restriction creating a hydrostatic pressure more evenly distributing the gas flow between the tubes eliminating the requirement for flow distribution devices, such as air straighteners and perforated plates.

An electrostatic chuck is provided which includes a circular ceramic plate having an electrostatic attractive electrode, a mounting surface for supporting a waferhich is formed on one of the main surfaces of the circular ceramic plate, an annular gas groove formed on the periphery of the mounting surface in the form of concentric circles with a gas inlet communicating with the annular gas groove, and a circular gas recess formed inside the ceramic plate and surrounded by the annular gas groove w...

An electrostatic precipitator having a plurality of electrostatic precipitation units positioned within the electrostatic precipitator. Each of the electrostatic precipitation units includes a plurality of negative wire electrodes and a plurality of positive electrode plates. The electrostatic precipitation units are arranged such that spacing between the negative wire electrodes of a first electrostatic precipitation unit is a first distance apart, and spacing between the negative wire electrod...

The invention provides apparatus for electrostatically coating a pharmaceutical tablet core with powdered coating material. The apparatus comprises a first rotary drum (12) on which a core is held in electrical isolation from its surroundings but at a potential differecne to earth by an electrode which contacts the core. The core is carried past a coating station B at which particles of powder having an opposite potential difference to earth are held in a tray (18). The surface of the drum is he...

A fueling station is provided with apparatus for preventing accidental fires including communication with the person performing the fueling operation and preventing fuel delivery unless the person performing the fueling operation is safely purged of static electricity. Also a vehicle is provided with static discharge pad apparatus for safely discharging static electricity of a person leaving the vehicle.

An electrostatic precipitator that removes zinc whiskers from cooling air provided to cool components in an electronics enclosure. The electrostatic precipitator comprises an ionizer configured to apply a charge to zinc whiskers suspended in the cooling air. The electrostatic precipitator also comprises a collector that collects charged zinc whiskers from the contaminated cooling air to generate uncontaminated cooling air for cooling the components of the electronics enclosure. The electrostatic...