An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO.sub.2, ZrO.sub.2, V.sub.2 O.sub.5, Nb.sub.2 O.sub.5, Ta.sub.2 O.sub.5, Co.sub.3 O.sub.4, Cr.sub.2 O.sub.3, and NiO so that its electrical resistivity in a working temperature ...

Disclosed is an electrostatic chuck comprising a ceramic dielectric layer having a surface for placing thereon a work that is to be held, and an electrode provided on a surface opposite to the surface of the ceramic dielectric layer for placing the work thereon, wherein: the placing surface of the ceramic dielectric layer is sectionalized into an outer peripheral region and a central region by gas injection grooves extending in a circumferential manner; the surface roughness Ra(o) of the outer p...

The invention relates to an electrostatic precipitator for collecting liquid or solid particles from a gas stream. The electrostatic precipitator consists of a tube (1), through which the gas to be cleaned flows longitudinally, the internal wall (1A) of the tube forming a precipitating electrode for the particles to be collected. An internal electrode (2) extending in a lengthwise direction is disposed concentrically inside tube (1), a high electrical voltage being present in the space between t...

An electrostatic actuator includes a stator having a plurality of protruding electrodes formed on a surface of a base material, where the surface serves as a counter surface, and a mover disposed so as to face the stator, where the mover has a plurality of protruding electrodes formed on a surface of a base material and the surface serves as a counter surface. A side surface of each of the protruding electrodes of the stator faces a side surface of a corresponding one of the protruding electrode...

An electrostatic chuck includes a ceramic base having an electrode embedded in vicinity to a holding face for holding a substrate. On a back side of this ceramic base, provided are a terminal connected to the electrode, a wafer temperature control member, and an insulating member for insulating the temperature control member from the terminal. This insulating member has a flange portion on its end portion in contact with the ceramic base, and is made of highly thermal conductive ceramics.

An electrostatic chuck having a good soaking feature and allowing a wafer to reach a saturation temperature quickly is provided. The chuck, which has a platy body with a pair of main surfaces, one main surface being used as a mounting surface for mounting a wafer, and an attracting electrode on the other main surface or inside the body, has at least one gas introducing through hole formed so as to pass through the body, a gas flow path formed in the mounting surface by a plurality of mutually se...

The electrostatic chuck includes: a conductive base formed of metal or both metal and ceramics, serving as a chucking electrode; and an insulating film formed on one principal plane of the conductive base, the top face of the insulating film serving as a placing surface for placing a wafer; wherein the insulating film is formed of a uniform amorphous ceramics of an oxide and has a thickness in a range of 10 to 100 .mu.m, thereby preventing cracking and insulation breakdown in the insulating film...

Provided is an electrostatic chuck, including: a first insulating layer including a heat conductive silicone rubber with a thermal conductivity of at least 0.2 W/mK, which is formed on top of a metal substrate, either directly or with an adhesive layer disposed therebetween; a conductive pattern, which is formed on top of the first insulating layer, either directly or with an adhesive layer disposed therebetween; a second insulating layer including an insulating polyimide film, which is formed o...

An electrostatic precipitator is detailed. The precipitator includes a conduit for the passage of particles in an air flow and a generator of an electrostatic field substantially orthogonal to the air flow, and an ion supply, capable of charging the particles, in which the generator includes a point electrode and a two dimensional surface electrode. The plane surface electrode includes an ion source and the point electrode includes a counter electrode and the counter electrode is earthed.

An electrostatic actuator includes a movable piece provided on a substrate via supporting beams such that the movable piece can be displaced in the Y-axial direction. The movable piece is displaced by an electrostatic force between movable and stationary electrodes to drive a mirror, so that an optical path of an optical device is switched over. The electrode plates of the movable electrode have lengths in the Y-axial direction which are stepwise decreased in order from the electrode plate neare...