An ESC (Electrostatic Chuck) to chuck an object by electrostatic force, having an ESC main body supporting the object; a guide ring supported by the ESC main body and encircling the object; a dielectric material layer interposed between the guide ring and the ESC main body; a media gas supplier to supply a media gas to the guide ring; and a power supplier to supply power to the ESC main body. With this configuration, the ESC provides an apparatus to chuck a guide ring to an ESC main body, while ...

Various systems and techniques are disclosed for stopping, selectively controlling, and optimizing a flow of particles in a flowing stream. The systems and techniques utilize a multi-electrode assembly and various voltage waveforms applied to those electrodes. The particles flow past or near the electrode assembly and their flow is controlled by the configuration and arrangement of the electrodes and the voltage waveforms applied thereto. An additional strategy for countering particle leakage fl...

An electrostatic separator intended for separation of liquid phase systems, made up of mixtures of liquids of various electrical permittivity. In particular, the separator is intended for separation of an oil-and-water emulsion. The electrostatic separator contains a vessel, inside which there is suspended a system of electrodes energized from an external voltage source. The electrode system comprises at least one pair of conducting plates (8), which is attached to a supporting frame (7) and ele...

An electrostatic device (10) includes a first flexible electrode (1) on which a plurality of second electrodes (2) are mounted so as to move with the first electrode (1). Upon the application of an electrical charge, the or each second electrode (2) causes deflection of the first electrode (1) which deflection is enhanced by the movement of the second electrode therewith. A variety of different designs of the device are possible to provide movement of the first electrode in a plurality of direct...

A sensor 10 comprises an array of electrostatic sensor elements 12, each centred at a respective sensing position 14. Each element produces a respective output signal at 16. The outputs 16 can be used to drive respective pixels of a display. This allows an image to be created to represent the electrostatic charge distribution across the region to which the sensor is directed.

An apparatus and method for detecting an electrostatic charge on a flat panel imager pixel array. In one embodiment, the apparatus includes an insulator layer and a flat panel pixel array coupled to a bottom surface of the insulator layer. Each pixel of the pixel array has a storage capacitance, and an electrostatic charge corresponding to a voltage applied through an electrode coupled to a top surface of the insulating layer may be detected from each storage capacitance.

An electrostatic filter (1) has a chamber (11) into which a gas stream is introduced. An ioniser (19) in the form of an electrode array (20) is located in the chamber (11) and creates an ionising zone through which the gas stream passes. A charged outlet (21) is located downstream from the ioniser (19). As the gas stream passes through the ionising zone, the unwanted particles therein are charged and urged away from the outlet (21) by the ioniser (19). Charged particles approaching the outlet (2...

An electrostatic chuck includes a chuck body, an insulating layer formed on a surface of the chuck body and having an installation surface on which a wafer is to be installed, an inner electrode installed inside the insulating-layer, and projections projecting from the installation surface and having contact surfaces to which the wafer is to contact. A back side gas is flown into a space defined by the installation surface, the projections and the wafer, heat is supplied to the wafer, and heat o...

An electrostatic actuator comprises stators a movable section, and a holder. The stator is fixed to the holder and forms a stator frame together with the holder. The stator is mounted to the holder, faces the stator, and is positioned a predetermined distance away from the stator. Stripe-shaped stator electrodes extending in a predetermined direction are formed on the stators. The movable section comprises a support body arranged within a predetermined clearance and movable in a predetermined di...

The present invention provides an electrostatic chuck that is able to completely prevent abnormal discharge that not only causes damage and destruction of the electrostatic chuck, but also causes damage of the fixed substrate as well as the generation of particles. In the electrostatic chuck of the present invention, at least a first insulating member, on the side on which a fixed substrate is placed among a first insulating member and second insulating member disposed in mutual opposition betwe...