An electrostatic chuck is provided which includes a circular ceramic plate having an electrostatic attractive electrode, a mounting surface for supporting a waferhich which is formed on one of the main surfaces of the circular ceramic plate, an annular gas groove formed on the periphery of the mounting surface in the form of concentric circles with a gas inlet communicating with the annular gas groove, and a circular gas recess formed inside the ceramic plate and surrounded by the annular gas gr...

An electrostatic chuck includes; a base made of ceramics, in which an electrode generating electrostatic attractive force is embedded; a cooling member which contains metal; a bonding material which bonds the base and the cooling member to each other; a gas providing passage which penetrates the base, the bonding material, and the cooling member; and an engagement member and a bolt member, which are fixing members mechanically fixing the base and the cooling member to each other.

There is disclosed an electrostatic deflector having four pillar-like identical electrodes spaced from each other by 90.degree.. An even number of pillar-like electrodes are disposed in each space between the four electrodes. Spaces are formed on both sides of each one of the first electrodes and have bent portions. The even number of electrodes are arranged symmetrically relative to a third or fourth vertical plane including an axis spaced from the X-axis by 45.degree. or -45.degree., respectiv...

An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. Th...

The object of the present invention is to provide an electrostatic chuck which has high plasma resistance and high capability of cooling a material to be clamped. As for the basic structure of the electrostatic chuck, an insulating film is formed on a surface of a metal plate by flame spraying, and a dielectric substrate is bonded onto the insulating film by an insulating adhesive layer. The top surface of the dielectric substrate is a surface for mounting a material to be clamped W such as a se...

An electrostatic voltmeter has an input sensing terminal, a first operational amplifier, a second operational amplifier, a first reference voltage terminal electrically connected to the non-inverting input of the second operational amplifier, a low reference voltage terminal electrically connected to the output of the second operational amplifier, and a voltage indicator, electrically connected between the low reference voltage terminal and the first reference voltage terminal.

The object of the present invention is to provide an electrostatic chuck in which the surface can be kept smooth after being exposed to plasma, so as to protect a material to be clamped such as a silicon wafer from being contaminated with particles, and which is excellent in clamping and releasing a material to be clamped. According to the present invention, there is provided an electrostatic chuck comprising a dielectric material in which alumina is 99.4 wt % or more, titanium oxide is more tha...

An electrostatic atomizer includes a body defining an interior space and a discharge orifice communicating with the interior space. An emitting electrode or electron gun is disposed inside the body so as to apply charges to the fluid passing through the interior space. A counter electrode is disposed outside the body. The exposed surfaces on the interior of the body are formed from a dielectric material so that there are no substantial electric field between exposed conductive elements on the in...

A low density ash particle separation and collection method and device for separating low density particles, primarily frothy-solid particles with internal and external porosity and thick walled hollow particles, from the overall mixture of higher density particles including raw fly ash as produced by coal fired power plants. Specifically, the invention relates to a device and method for separating and collecting the low density fly ash fraction composed of thick walled hollow fly ash particles ...

An electrostatic microrelay is disclosed. The electrostatic microrelay includes a fixed substrate having a fixed electrode and a fixed terminal on its upper surface and a moveable substrate having a moveable electrode and a moveable terminal on its lower surface. The moveable substrate is elastically supported by a support member that is disposed between the fixed substrate and the moveable substrate in a manner that the lower surface of the moveable substrate faces the upper surface of the fixe...