An electrostatic lens having at least three electrodes and an insulating holder for holding the electrodes, the inner wall of the holder being coated with a silicone carbide film. The silicone carbide film may be formed by means of a vapor deposition method. The energy of an electron beam is set to 1.5 keV or lower. The silicone carbide film may be added with an additive for controlling the electric conductivity of the silicone carbide film. The additive may be nitrogen.

An electrostatic relay essentially comprises a fixed electrode with a fixed contact insulated therefrom, a movable electrode plate with a movable contact insulated therefrom, and a fixed pair of oppositely charged electrets. The movable electrode plate is pivotally supported at a pivot in a cantilever fashion or a seesaw fashion, and also to move about the pivot axis relative to the fixed electrode between two rest positions of closing and opening the contacts. A control voltage source is connec...

A spray arrangement including means to form and direct a spray of liquid droplets and means to apply an electrostatic charge to droplets in said spray, said charge applying means including an insulating body to support a spray-charging electrode in association with the spray-forming means, the spray-forming means [10] forming the spray hydraulically, the body [20] having a smoothly-constricted bore [26, 27, 28] for the free passage of spray with the electrode [23] housed to expose only inward-fa...

In a printhead for electrostatic printers, the styli of the printhead are formed on a monolithic substrate, such as a printed circuit board. Each stylus has its own driver circuit incorporated into one or more integrated circuit die which are mounted directly on the monolithic substrate, and electrically connected to traces formed on the printed circuit board. The styli are the ends of the traces as formed on the edge of the substrate. The integrated circuit die are connected to the traces by wi...

An improvement is proposed in an electrostatic chuck having a chuck head comprising an electrode layer sandwiched between a backing insulating layer and a frontal insulating layer, which comes into contact with a work piece when the electrostatic chuck is working, by which the electrostatic chuck can exhibit a large electrostatic attractive force by increasing the voltage applied between the electrodes without the problem of dielectric breakdown in the insulating layer and a leak current occurri...

An electrostatic positioner with one or more first electrodes for producing forces to confine a charged specimen in the direction perpendicular to a center axis and second electrodes for producing forces to confine the charged specimen in the direction of the center axis.

An electrostatic precipitator of the present invention is composed of a discharge section positioned in a casing inducing gas to be treated containing unwanted matters such as dust and miscellaneous bacteria from a gas feeding duct to a gas exhaust duct and arranged in a state of crossing with a passage of the gas to be treated, and dust collecting sections each having a gas permeable configuration installed in parallel with each other at a distance in front and in the rear with respect to the d...

An electrostatic chuck comprising a chucking body of a dielectric ceramics and an electrostatic inner electrode embedded in the chuck (first invention), the ceramics having a volume resistivity value not more than 10.sup.13 .OMEGA.cm at a high temperature not less than 250.degree. C. This electrostatic chuck can properly chuck, fix, carry and correct wafers even at a high temperature not less than 250.degree. C. in CVD, PVD or high temperature etching apparatuses. An electrostatic chuck comprisi...

An electrostatic actuator comprising: a first member (1) having a plurality of belt-like electrodes (4) insulated from one another and disposed in a predetermined direction with predetermined gaps between them; a second member (10) constituted by a resistance body on the opposed surface thereof coming into contact with the surface of the first member (1); and control means (11) capable of changing an impressed voltage to be applied to each of a plurality of belt-like electrodes disposed on the f...

An electrostatic chuck having an insulating layer comprising solid-solution grains comprised of alumina and a transition metal oxide having the structure of a corundum, and a glass component present in grain boundaries of the solid-solution grains. The transition metal oxide is a transition metal oxide capable of forming a solid solution with alumina, and preferably includes chromia (Cr.sub.2 O.sub.3), whose crystal structure is similar to alumina, having the structure of a corundum. The electro...