
An electrostatic chuck has a substrate, an insulating layer disposed on the substrate for attracting a workpiece thereto, and an electrode interposed between the substrate and the insulating layer. The insulating layer having a volume resistivity .rho.(.OMEGA.m), a dielectric constant .epsilon..sub.r, and a thickness d (m), and being spaced from the workpiece which is attracted thereto by a gap having a distance .delta.(m). The volume resistivity .rho., the dielectric constant .epsilon..sub.r, t...











