Electrostatic precipitator is disclosed, including a discharge unit having ground electrodes and discharge electrodes, and a collecting unit having collecting electrodes and positive electrodes, wherein the discharge unit is applied of a voltage enough to emit a photo-energy which can activate a photo-catalyst, and a component in the electrostatic precipitator contains the photo-catalyst, or a separate photo-catalyst filter containing the photo-catalyst is provided within a reach of the photo-en...

An electrostatic chuck for attracting an object for treatment. The electrostatic chuck includes a substrate, an insulating dielectric layer and at least one electrode located between the substrate and the insulating dielectric layer. The object is attracted onto the electrode via the insulating dielectric layer. The insulating dielectric layer is between 0.5 mm and 5.0 mm thick, and utilizes a gas-introducing hole to form a gas-diffusing depression on the side of an attractive surface, allowing ...

An improved electrostatic filter particularly for use in high performance clean rooms for the semiconductor industry is achieved by forming a layer of wires in a "plane" having corrugations along an axis perpendicular to the axes of the wires. The "plane" is designed to mate with the corrugations of a mechanical filter placed immediately upstream in the air flow path. Alternate wires of the layer are maintained electrically at opposite polarities to strengthen the fields and the corrugations per...

An electrostatic precipitator includes charging, inertia and collection sections, which are arranged in the order mentioned along the direction of gas flow containing therein particles to be removed. The charging section includes a parallel electrode and a discharging electrode located between the parallel plates, and, thus, the particles floating in the gas passing through the charging section become charged and partly agglomerated. The inertia section includes a deflector plate arranged at a p...

An electrostatic precipitator is provided comprising a plurality of spaced apart vertically extending collector plates with an array of vertically extending ionizer wire rods disposed in a space between each of the collector plates. The improvement resides in an ionizer wire rod construction made of a heat resistant alloy, one end portion of which terminates into a plurality of closely packed helically formed loops. The size of the loops as a unit is sufficient to hook onto and freely hang from ...

A dry horizontal flow electrostatic precipitator for removing suspended particles from the gas flow. The precipitator has a casing, a treatment zone consisting of high voltage and collecting electrodes, rapping means to dislodge the particles from the electrodes, an inlet opening at one end of the casing for admitting the untreated gas and an outlet opening at the other end for discharging the treated gas stream. The precipitator has gas distribution means near the inlet face of the treatment zo...

An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the exposed surfaces of the support body except a portion thereof over which the work is placed. This chuck can not only prevent impure matters from generating from the surfaces of the support bod...

In an electrostatic chuck of the type wherein an electrode is covered by an insulating dielectric member, an object, typically a semiconductor wafer, to be electrostatically attracted is mounted on the dielectric member, and a potential difference is applied across the wafer and the electrode, the electrode is shaped such that the distribution of the electrostatic attractive force applied to the wafer would not be uniform throughout the attractive surface of the chuck. To this end the electrode ...

An electrostatic chuck (1) for holding a semiconductor wafer (5) comprises a dielectric layer (4) on a supporting electrode (2). The wafer is clamped flat against the dielectric layer when a potential difference is applied between the wafer and the electrode. The dielectric is loaded with a thermally conductive material to improve the dissipation of heat generated in the wafer during a processing treatment such as exposure to an electron beam. The dielectric also has charge retention properties ...

A folder of a web-fed rotary printing machine includes a device for separating a stream of signatures into a plurality of secondary streams thereof having a device for applying an electrostatic charge to a signature, two diverter cylinders disposed alongside one another and carrying thereon electrostatically chargeable elements extending substantially parallel to respective axes of the diverter cylinders, a device for conducting the signature to the diverter cylinders, and a device for removing ...