An electrostatic precipitator comprising a corona discharging section for charging dust particles as they pass through and a dust collecting section which has at least two sets of negative plate electrodes for collecting the positively charged dust particles and auxiliary plate electrodes to accelerate the dust particles to the collecting plate electrodes. The collecting and auxiliary plate electrodes in each set are so alternately arranged that the arrangement of the collecting and auxiliary pl...

An electrostatic drive having a plurality of mover electrodes operatively secured to a mover, and a plurality of stator electrodes operatively secured to a stator. The mover and stator are configured to move relative to each other via electrostatic force generated between the mover electrodes and the stator electrodes. The electrostatic drive includes a driver configured to place the stator electrodes in any of a number of sequential voltage states, each being defined by a combination of LO and ...

An electrostatic chuck which allows sufficiently rapid temperature rising/dropping thereof, in case that the diameter of a ceramic substrate is 190 mm or more or especially in case that the diameter of the ceramic substrate is quite large, exceeding 300 mm. The electrostatic chuck includes a ceramic substrate equipped with a temperature controlling means, an electrostatic electrode formed on the ceramic substrate, and a ceramic dielectric film provided on the electrostatic electrode. The ceramic...

An electrostatic actuator has: an upper structure that is connected, via an arm, to a supporting base provided on a substrate and is supported in a space existing over the substrate; a lower structure that is provided in a substrate position in such a way as to oppose the upper structure; an inclination structure that is provided with respect to either one of the upper structure and the lower structure so as to make small the distance between the upper structure and the lower structure; and one ...

An electrostatic actuator includes a movable member that is connected to a movable member securing section through a movable connection beam so that the movable member can be displaced in the x-axis direction. Drive electrode supporting sections are connected to drive electrode securing sections through driving connection beams so that they can move towards and away from each other. Gap sizes a, b, and c between first movable electrodes to third movable electrodes and respective first drive elec...

An electrostatic precipitator includes several dividable supporting rods, which are passed through corresponding big holes, and tightly fitted in corresponding small holes of metallic boards so as to support the metallic boards equidistantly spaced apart in position. Each supporting rod is made of several connectable parts, each of which has an insertion end portion, and a hollow holding end portion. Each supporting rod is assembled by means of joining insertion end portions to adjacent hollow h...

An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. A...

Disclosed herein are an electrostatic developer comprising image-forming particles which are magnetic, conductive particles having an average particle size of not more than that of the image-forming particles and more than 0.1 .mu.m, and particles obtainable by subjecting insulative inorganic oxide particles having a frictional charging polarity opposite to that of the image-forming particles to a hydrophobic treatment with silicone; and an electrostatic developing method in which the developer ...

Electrostatic chucks and methods of forming the chucks are disclosed. The chucks include ceramic materials directly bonded with a layer of active braze alloy. The active alloy operates as both a conductive layer of the electrostatic chuck and a mechanism for bonding the dielectric layer to the base of the chuck. Electrical feedthroughs to the electrode may also be formed using the active alloy.

An electrostatic actuator includes a stationary element having a plurality of driving electrodes arranged in a predetermined direction and with predetermined spaces in an isolated state on an insulating supporter, a movable element, disposed in contact with the stationary element, electric wires connected to the driving electrodes of the stationary element, and a driving voltage control section to apply to the driving electrodes voltages which cause a change in the relative position of the first...