
An illumination apparatus for illuminating an object with X-rays. The illumination apparatus has a high illumination efficiency, and the numerical aperture of the X-rays is nearly uniform over an arcuate area, and is independent of the illumination position. The apparatus comprises an excitation energy light generation unit for generating excitation energy light rays and a target member having a curved surface and plurality of X-ray sources formed thereon that emit X-rays when irradiated by the ...











