
Integrated microsystem comprising electrical and nonelectrical, particularly optical functions in a laser system, wherein a base comprising anisotropically etchable semiconducting material on which etching structures for receiving optical and/or electro-optical and electrical/electronic and/or fluidic and/or mechanical elements or their mountings are arranged in predetermined distances and/or levels, as well as integrated switching circuits, and that at least a part of the optical, electro-optic...









