A plasma generating section generates a plasma in a process vessel. A plasma process section executes a plasma process to a substance to be processed by moving the plasma generated by the plasma generating section. A sensor section outputs an electrical signal corresponding to the intensity of plasma light having a predetermined wavelength in the plasma when the plasma process is executed by the plasma process section. A smoothing section smooths the electrical signal output from the sensor sect...

In a plasma torch, the contact surface (61) between the nozzle (6) and the swirler (5), the contact surface (4b) between the swirler (5) and the insulating cylindrical body (4), the contact surface between the insulating cylindrical body (4) and the electrode (3), and the contact surface (3a) between the electrode (3) and the electrode table (2) are arranged in line from the nozzle (6) to the torch body (1). The inner diameter (d1) of the portion of insulating cylindrical body (4) positioned in ...

A plasma-processing method used in processes for manufacturing semiconductor devices. During plasma processing, ultraviolet radiation is emitted from a region where a plasma is created. An ultraviolet radiation-blocking means blocks the ultraviolet radiation from impinging on the sample surface to protect it. The blocking means passes particles forming a plasma onto the sample surface. The particles passed through the ultraviolet radiation-blocking plates are implanted into the sample. Alternati...

A plasma display having a quartet type pixel structure provides a high grade and excellent picture quality picture and maintains good white balance and excellent intensity levels. The plasma display comprises a reference circuit .phi. for outputting a control signal based on the least significant bit of a digitized green video signal and a timing signal and an arithmetic circuit 8 for performing an arithmetic operation on the output of the reference circuit. As a result of this arrangement, the ...

The invention relates to a plasma unit, in particular for treating solids containing alkyl groups with a low-temperature plasma, having a treatment reactor and plasma-generation apparatuses assigned to the treatment reactor. It is provided that an apparatus (14) for generating a melt of the solids (24) to be treated is assigned to the treatment reactor (12).

A plasma generator comprising a propagation chamber propagating an electromagnetic radiation, and a plasma-generating chamber associated with the propagation chamber; said propagation chamber has a passage region of increasing width on moving away from the entrance region for insertion of the electromagnetic radiation into the propagation chamber. The passage region enables an at least partial passage of the electromagnetic radiation towards the plasma-generating chamber.

A plasma reactor including a plasma generating electrode which includes a plurality of unit electrodes hierarchically layered at specific intervals, a casing in which the plasma generating electrode is disposed, and a power supply which applies a voltage to the unit electrodes, generating plasma in a space formed between the unit electrodes by applying a pulse voltage between the unit electrodes from the power supply, and capable of processing exhaust gas introduced into the space through reacti...

The present invention relates to a plasma generator to apply cold plasma in the fields of medicine, biology, ecological recovery, activation, purification, special processing of gases, liquids and solid substances as well as other areas of technology and science. A plasma generator of the invention comprises: a power source; an electronic oscillator constructed on an amplifying (control) element which is connected to a low voltage input section; a resonance transformer having a low voltage input...

A torch for producing an inductively coupled or microwave induced plasma for use in spectrochemical analysis. The torch includes a central tube (25) for conveying a flow of a gas carrying sample aerosol to a plasma (17) produced in the torch. The tube (25) has an inlet (31) and an outlet (39) of smaller size than the inlet and is shaped to deliver a substantially laminar flow of the gas at the outlet (39). The tube (25) is tapered along at least a substantial portion of its length such that its ...

A substrate whose elemental constituents are selected from Groups III and V of the Periodic Table, is provided with pre-defined masked regions. Etching of the substrate comprising the steps of: a) forming a gas containing molecules having at least one methyl group (CH.sub.3) linked to nitrogen into a plasma; and b) etching the unmasked regions of the substrate by means of the plasma. For a substrate whose elemental constituents are selected from Groups II and VI of the Periodic Table, the plasma...