This invention is a hardware modification which permits greater uniformity of etching to be achieved in a high-density-source plasma reactor (i.e., one which uses a remote source to generate a plasma, and which also uses high-frequency bias power on the wafer chuck). The invention addresses the uniformity problem which arises as the result of nonuniform power coupling between the wafer and the walls of the etch chamber. The solution to greatly mitigate the nonuniformity problem is to increase th...

A plasma display is adaptive for improving brightness and discharge efficiency. In the plasma display, a pair of transparent electrodes is formed in opposing relation to each other and having a predetermined gap within a discharge cell. A metal electrode is connected to each transparent electrode in the pair. The gap is formed in a diagonal direction within the discharge cell.

A high pressure plasma heating torch comprising a hollow dielectric cylinder and a pair of electrically conductive end plates which form a plasma chamber in the cylinder and where the end plates are respectively provided with gas inlet and discharge ports. A pair of aligned, electrically conductive heating coils are concentrically disposed about the cylinder and in this arrangement extend along the cylinder for substantially the entire length thereof. The coils are connected together at a centra...

A plasma confinement device having separate means for repelling positive ions and for repelling electrons from the walls of the plasma chamber. The electrons are repelled from the central portion of the chamber by a sufficiently strong magnetic field. However, the positive ions which are little affected by the magnetic field are repelled from the walls of the chamber by making the walls of an insulating material which charges positively by impact of a few of the positive ions. The chamber has tw...

An inert gas welding torch is used to create plasma by directing one or more discrete high velocity jet gas streams into a welding arc between the electrode and the workpiece. The plasma stream is controllable with regard to energy content or location by varying the amount or direction of the inert gas flow. The plasma stream is insensitive to variations of arc length, and permits abnormally high current densities in the electrode. When used with consumable electrodes, the invention is useful fo...

A pump for plasma and the like is provided suitable for use with but not confined to available plasma containers and with the rate of discharge maintained constant but adjustable over a wide range, the pump being portable and self-contained, with accessibility to the components, and having a fluid transferring spring-impelled piston driving a pressure plate which is manually reset by a handle for each operation. The pump is independent in operation, of temperature, weather conditions, altitude, ...

A spray nozzle having a series of helical grooves cut in the outside surface of the nozzle in order to shape and confine the flame ejected from the interior of the gun. The force of the flame draws air through the grooves and thereby provides a helical shield which prevents the flame from spreading and makes it more stable.

An electric furnace adapted to be heated with a gaseous plasma, and including within the furnace a quantity of low work function material which promotes the establishment and sustenance of the gaseous plasma, said quantity being on the order of about one milligram per square centimeter of furnace area.

A blood-collecting tube of the evacuated type containing an anticoagulant receives through normal techniques whole blood to be tested. Thereafter, a cell-collecting tube is interconnected with the blood-collecting tube through the intermediary of a double-ended needle assembly including an external discoidal hub intermediate the ends thereof, such that the interior of both tubes communicate with one another. The tubes with the interconnecting needle assembly are then subjected to centrifugation ...

A plasma generator which utilizes radio frequency power and is of the kind having a slotted transmission line consisting of a hollow tubular body electrically matched to an RF generator, in which the hollow body makes up a delay line in which the RF energy is caused to propagate with a time delay in the direction of the axis of said hollow body the radiofrequency power, by enabling heating of the plasma independent of the intensity of a magnetic field used for confining the plasma, provides a hi...